Concentration Measurement Device Real-Time Error Correction
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Solution Overview
Problem
Conventional gas concentration measurement devices in semiconductor manufacturing equipment face challenges in real-time measurement accuracy due to environmental influences and require complex calibration setups, as both measurement and calibration cells share the same light source and detector, necessitating a simpler method for error correction.
Innovation Solution
A concentration measurement device with a splitter to divide light into incident and non-incident paths, using a multiplexer for different wavelengths, and an arithmetic part to correct detection signals based on non-incident light intensity, eliminating the need for a separate calibration cell by employing a system with light sources of varying frequencies and detectors for real-time signal correction.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a calibration cell is used to correct measurement errors, then measurement precision is improved, but device complexity increases due to requiring separate measurement and calibration cells with switching mechanisms
Solution Approach 1:
The patent combines the calibration function directly into the measurement cell by introducing a reference gas mixture at a known concentration. This eliminates the need for a separate calibration cell and switching mechanisms, while maintaining the ability to correct measurement errors. The measurement cell serves dual purposes: measuring unknown concentrations and performing calibration with reference gas.
Solution Approach 2:
The measurement cell is designed to perform multiple functions: it can measure the concentration of unknown gas mixtures and also serve as a calibration cell by introducing reference gas with known concentration. This multi-functionality eliminates the need for separate dedicated calibration hardware while maintaining measurement accuracy.
2Measurement precision
If real-time calibration is performed to maintain measurement accuracy, then measurement precision is improved, but productivity decreases due to calibration time requirements
Solution Approach 1:
The patent enables continuous real-time calibration by introducing reference gas with known concentration into the measurement cell during normal operation. The system continuously compares measured absorbance values with expected values from the reference gas, allowing for real-time correction of measurement errors without interrupting the measurement process.
Solution Approach 2:
The system performs preliminary calibration by introducing reference gas before actual measurements or between measurement cycles. This preliminary action establishes baseline absorbance values that are used to correct subsequent measurements, ensuring accuracy is maintained without requiring time-consuming calibration procedures during critical measurement periods.
3Reliability
If a separate calibration cell is used to avoid contamination, then reliability is improved, but device complexity increases
Solution Approach 1:
The patent segments the calibration function from the physical calibration cell concept, instead implementing it as a functional capability within the measurement cell. By introducing reference gas through a separate inlet while using the same measurement cell, the system maintains contamination prevention through functional separation rather than physical separation, reducing overall device complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables real-time correction of measurement errors without a calibration cell, maintaining accuracy and simplifying the structure, allowing for continuous operation without contamination risks.
Implementation Method 1
concentration measurement device for measuring gas concentration based on the principal of absorption spectrophotometry
Implementation Method 2
a splitter for dividing light from the light source into incident light being incident into the measurement cell and non-incident light not being incident into the measurement cell
Data Source
AI summary
A concentration measurement device including at least one light source; a measurement cell for containing a fluid to be measured; a splitter for dividing light from the light source into incident light being incident into the measurement cell and non-incident light not being incident into the measurement cell; a transmitted-light detector for detecting transmitted light that is the incident light having passed through the measurement cell; a non-incident light detector for detecting the non-incident light; and an arithmetic part for correcting a detection signal of the transmitted-light detector using a detection signal of the non-incident light detector.