Concentration Measurement Device with Rotatable Disk for Semiconductor Calibration
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Solution Overview
Problem
Concentration measurement devices for semiconductor fabrication processes require calibration, which disrupts the fabrication process and leads to decreased reliability due to the need for a reference liquid and suspension of the process for calibration.
Innovation Solution
A concentration measurement device with a light source, beam splitter, sample member, reference member, first reflective mirror, rotatable disk, and controller that splits light into two paths for sample and reference material, allowing for simultaneous concentration measurement and calibration without stopping the semiconductor fabrication process.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If calibration is performed using a reference liquid, then measurement precision is improved, but the semiconductor fabrication process must be suspended and productivity decreases
Solution Approach 1:
The patent divides the single light path into two separate paths: one for measuring the object material concentration and another for calibration using reference material. This segmentation allows both measurement and calibration to occur simultaneously without interfering with each other, eliminating the need to suspend the fabrication process for calibration while maintaining measurement precision.
Solution Approach 2:
The patent combines the measurement function and calibration function into a single integrated system that operates simultaneously. By merging both functions into one device with parallel optical paths, the system can perform both concentration measurement and calibration without stopping the semiconductor fabrication process, thus resolving the contradiction between precision and productivity.
2Measurement precision
If calibration is performed, then measurement precision is improved, but the fabrication process is interrupted and time is lost
Solution Approach 1:
The patent segments the optical measurement path into two independent channels: one for object material measurement and another for reference material calibration. This allows calibration to occur continuously during fabrication without interrupting the process, eliminating time loss while maintaining precision.
Solution Approach 2:
The patent enables continuous calibration during the fabrication process by using a separate optical path for reference material measurement. The calibration function operates continuously without interrupting the fabrication process, maintaining both time efficiency and measurement precision simultaneously.
3Device complexity
If a single light path is used for both measurement and calibration, then device complexity is reduced, but measurement precision decreases due to interference
Solution Approach 1:
The patent segments the optical path into two separate channels: one dedicated to object material measurement and another to calibration reference measurement. This segmentation eliminates interference between measurement and calibration operations, maintaining high precision while adding only minimal complexity through the beam splitter and separate detection paths.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables real-time concentration measurement and calibration of the device, maintaining process reliability and efficiency by continuously classifying light for measurement and calibration without interrupting the semiconductor fabrication process.
Implementation Method 1
The beam splitter may be configured to split a light, which may be emitted from the light source, into a first light in a first direction and a second light in a second direction
Implementation Method 2
A light may be irradiated to the cell to measure the concentrations of ingredients in the liquid based on an absorbance of the cell
Implementation Method 3
The light receiver may be configured to detect a wavelength of the first light and a wavelength of the second light sequentially incident to the receiver by rotating the disk
Data Source
AI summary
A concentration measurement device may include a beam splitter. The concentration measurement device may include a first optical path and a second optical path. The concentration measurement device may include a rotatable disk. The first optical path and the second optical path may reach to the rotatable disk. The rotatable disk may include at least one passing portion and at least one reflecting portion. The concentration measurement device may include a light receiver configured to detect a wavelength of the first light ant second light. The concentration measurement device may include a controller comparing the wavelengths of the first and second light. The controller compares the concentration of the object material with a reference concentration of the object material to obtain concentration control information, and the controller compares the concentration of the reference material with a normal concentration of the reference material for a concentration calibration.