Concentration Measuring Device Temperature Control and Self-Verification
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Solution Overview
Problem
Existing concentration measuring devices for chemical solutions in semiconductor manufacturing lack reliable temperature control, aging monitoring, and self-verification capabilities, leading to inconsistent measurements and potential abnormalities.
Innovation Solution
A concentration measuring device with a light-emitting unit, measurement unit, and reference measurement unit, utilizing a spectroscopic unit to separate light into measurement and reference light, and a verification unit for self-verification, along with a constant temperature module to maintain optimal measurement conditions and monitor device aging.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a concentration measuring device is used without temperature control, then the device complexity is reduced, but the measurement precision deteriorates due to temperature variations affecting light absorption
Solution Approach 1:
The patent introduces a constant temperature module that actively controls the temperature parameter of the measurement environment. By maintaining a stable temperature, the system eliminates temperature-induced variations in light absorption, thereby ensuring consistent measurement precision without significantly increasing overall device complexity
Solution Approach 2:
The patent introduces a reference measurement unit that serves as an intermediary for compensation. This unit measures light absorption under reference conditions (without sample or with standard sample), and the controller uses this reference data to compensate for environmental variations including temperature, thus maintaining measurement precision
2Reliability
If self-verification capability is added to monitor device aging, then the reliability is improved, but the device complexity increases due to additional verification units
Solution Approach 1:
The verification unit is designed to perform multiple functions: it verifies the normal operation of the measurement unit, monitors the aging state of optical components, and provides early warning for maintenance. By consolidating these verification functions into a single integrated unit, the patent improves reliability without proportionally increasing device complexity
Solution Approach 2:
The system performs self-verification through the verification unit that automatically checks the measurement unit's operation and component aging without external intervention. This self-service capability enhances reliability by enabling continuous monitoring and early detection of degradation, while avoiding the need for separate external verification systems
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The device provides reliable concentration measurements by maintaining suitable temperature, monitoring device aging, and detecting abnormalities through self-verification, ensuring consistent and accurate results.
Implementation Method 1
measure a concentration of a chemical material in the sample by measuring an amount of light absorbed by the sample
Implementation Method 2
a measurement photodiode sensor configured to receive the first measurement light
Implementation Method 3
a beam splitter configured to transmit the first measurement light and reflect the second measurement light
Implementation Method 4
a heat sink connected to the first light source and configured to dissipate heat of the first light source
Implementation Method 5
a fan configured to cool an inside of the housing
Data Source
AI summary
A concentration measuring device according to an embodiment may include a light-emitting unit configured to generate measurement light, a measurement unit configured to receive first measurement light that is part of the measurement light and that passes through a sample that is a measurement target, and a reference measurement unit configured to receive second measurement light that is part of the measurement light and that does not pass through the sample, wherein the concentration measuring device may be configured to measure a concentration of a chemical material in the sample by measuring an amount of light absorbed by the sample based on an amount of light detected by the measurement unit and an amount of light detected by the reference measurement unit.