Concentric Anode Ion Source for Diamond-Like Carbon Deposition
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Solution Overview
Problem
Existing ion beam deposition methods for diamond-like carbon layers often require multiple ion sources, which is impractical due to space and cost constraints, limiting the ability to deposit two or more layers with different film thicknesses for effective wear protection and magnetic performance.
Innovation Solution
A single ion source with two concentric anodes is used, where different voltages are applied to control the thickness of carbon layers by adjusting the flux distribution, allowing for the deposition of thicker layers in the laser texture zone and thinner layers in the data zone.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If two or more ion sources are used to deposit carbon layers with different thicknesses, then the wear protection and magnetic performance are improved, but the device complexity and cost increase
Solution Approach 1:
The single ion source is segmented into multiple anode regions (first anode and second anode) that can be independently controlled. Each anode region directs ion flux to different zones of the substrate, enabling differential thickness deposition without requiring multiple separate ion sources. This segmentation allows the system to achieve the functionality of multiple ion sources while maintaining a single source structure.
Solution Approach 2:
Different regions of the ion source (controlled by first and second anodes) are given different local properties through independent voltage control. The first anode controls ion flux to the laser texture zone while the second anode controls ion flux to the data zone, allowing each zone to receive optimized deposition conditions locally. This enables thicker layers in the laser texture zone and thinner layers in the data zone simultaneously.
2Reliability
If two or more ion sources are used to deposit carbon layers with different thicknesses, then the wear protection and magnetic performance are improved, but the space requirements increase
Solution Approach 1:
Multiple ion source functionalities are merged into a single ion source structure. The first anode and second anode are integrated within the same ion source chamber, allowing both to operate simultaneously from a compact location. This merging eliminates the need for multiple separate ion source assemblies, significantly reducing the space requirements while maintaining the capability to deposit different thicknesses in different zones.
Solution Approach 2:
The patent employs a nested configuration where the first anode and second anode are positioned concentrically within the ion source. The anodes are arranged in nested cylindrical configurations, with one anode inside another, maximizing the use of space and enabling complex ion flux control from a compact structure. This nesting arrangement allows multiple functional zones to be packed into minimal space.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables efficient deposition of diamond-like carbon layers with varying thicknesses, enhancing wear protection and magnetic performance while reducing the need for multiple ion sources, thus improving cost-effectiveness and practicality.
Implementation Method 1
The ion source comprises a first cylindrical anode, a second cylindrical anode, and an electron source
Implementation Method 2
applying a first voltage from a first voltage source to the first cylindrical anode to deposit a first thickness of the source material
Implementation Method 3
depositing at least one carbon-containing layer on the at least one magnetic layer
Data Source
AI summary
An ion source is provided. The ion source comprises a first cylindrical anode and a second cylindrical anode. The first cylindrical anode is concentric with the second cylindrical anode. The ion source further comprises an electron source positioned within the first cylindrical anode or the second cylindrical anode.