Concentric Dual Flow Injector Cleaning Apparatus
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional cleaning methods for gas injectors, such as manual scrubbing and ultrasonic cleaning, are inadequate in removing ceramic and Yttria particles from the confined surfaces, leading to potential contamination in plasma processing systems.
Innovation Solution
A concentric dual flow introducer and flow-dispersing injector seat apparatus that uses deionized water and compressed dry air, with compressible and rigid sealing portions to maintain floating gaps and regulate fluid flow, ensuring effective cleaning of both central and peripheral passages of the gas injector.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional manual scrubbing and ultrasonic cleaning methods are used, then the cleaning process is simple and quick, but ceramic and Yttria particles remain on the injector surfaces
Solution Approach 1:
The patent employs a pneumatic-hydraulic cleaning system where compressed gas and liquid are delivered through concentric annular nozzles to create high-velocity jets that impact the injector interior surfaces. The compressed gas flow (e.g., nitrogen or argon) and liquid spray work together to dislodge and flush away ceramic and Yttria particles, achieving superior cleaning effectiveness compared to conventional methods while managing system complexity through integrated flow control.
Solution Approach 2:
The cleaning apparatus divides the cleaning function into multiple concentric zones with independent flow control. The concentric annular nozzles create separate inner and outer cleaning jets that can be independently regulated, allowing targeted cleaning of different regions within the injector interior. This segmentation enables precise control over cleaning intensity in different areas while maintaining overall system manageability.
2Manufacturing precision
If high-pressure cleaning fluid is used to remove particles, then cleaning effectiveness improves, but the compressible sealing portion may abut the rigid facing portion causing damage
Solution Approach 1:
The patent employs compressible sealing portions with specifically engineered compressibility characteristics that allow dynamic adaptation to pressure changes. During high-pressure cleaning fluid delivery, the compressible sealing portion deforms elastically to accommodate pressure surges, preventing abutment against the rigid facing portion. The sealing portion's material properties and geometric configuration are optimized to maintain sealing contact while accommodating the mechanical stresses of high-pressure cleaning operations.
Solution Approach 2:
The compressible sealing portions are designed in advance with sufficient compliance to cushion against pressure shocks and surges before they can cause damage. The sealing portions' compressibility acts as a buffer that absorbs the mechanical energy of pressure spikes, preventing direct transmission of damaging forces to the rigid facing portion and injector components during cleaning fluid initiation and termination phases.
3Stability of the object's composition
If the injector is held firmly in place during cleaning, then positioning stability is improved, but the compressible sealing portion cannot accommodate fluid cleaning surges
Solution Approach 1:
The sealing interface is designed with compressible sealing portions that dynamically change their physical state in response to pressure variations. During cleaning operations, the compressible sealing portion deforms to accommodate pressure surges while maintaining contact with the rigid facing portion, allowing the injector to remain positioned stably without risking sealing failure or component damage.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus effectively removes ceramic and Yttria particles from the gas injector surfaces, improving the cleanliness and reducing the risk of contamination in plasma processing, thereby enhancing the quality of the work product.
Implementation Method 1
The compressible sealing portion of the input-side injector engaging interface has compressibility sufficient to yield under fluid cleaning surges attributable to initiation and termination of cleaning fluid flow through the injector cleaning apparatus
Implementation Method 2
The concentric dual flow introducer comprises an inner concentric cleaning fluid flowpath configured to communicate with a central passage of a gas injector, an outer concentric cleaning fluid flowpath configured to communicate with a plurality of peripheral passages of a gas injector
Data Source
AI summary
An injector cleaning apparatus with a concentric dual flow introducer and a flow-dispersing injector seat along with a method of cleaning an injector. The concentric dual flow introducer has concentric cleaning fluid flowpaths configured to communicate with a central passage and a plurality of peripheral passages of a gas injector. The input-side injector engaging interface of the concentric dual flow introducer and the flow-dispersing injector seat each have a compressible sealing portion having compressibility sufficient to yield under fluid cleaning surges attributable to initiation and termination of cleaning fluid flow through the injector cleaning apparatus along with resiliency sufficient to prevent abutment of the gas injector and a rigid facing portion of the input-side injector engaging interface and output-side injector engaging interface respectively.