Concentric Reagent Nozzle Layout for Efficient Effluent Abatement
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Solution Overview
Problem
Existing abatement apparatuses face inefficiencies in destruction rate and often require an oversupply of reagents to achieve optimal performance under certain operating conditions.
Innovation Solution
The inlet assembly features a reagent nozzle configured to deliver reagents non-uniformly around the effluent stream, with varying flow rates and quantities at different positions to match the effluent stream flow patterns, using a concentric arrangement with an obround cross-section and adjustable clearance distances and aperture sizes/densities to optimize reagent distribution.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If a uniform reagent distribution is used in existing abatement apparatus, then the apparatus structure is simple, but the destruction rate efficiency is insufficient and reagent oversupply is required
Solution Approach 1:
The reagent nozzle is designed with non-uniform aperture distribution, where aperture sizes and densities vary at different positions around the perimeter. This creates local variations in reagent delivery rates, providing higher reagent concentrations in regions requiring more treatment and lower concentrations in regions with less effluent, thereby optimizing destruction rate efficiency while reducing overall reagent consumption.
Solution Approach 2:
The reagent nozzle is segmented into multiple regions with different aperture characteristics. By dividing the nozzle into zones with varying aperture sizes and densities, the system delivers reagent in a spatially differentiated manner, matching the local demands of the effluent stream and improving destruction efficiency without requiring uniform oversupply.
2Productivity
If reagent is delivered at high flow rate throughout, then destruction rate efficiency improves, but reagent consumption increases
Solution Approach 1:
The system applies local quality by varying reagent delivery rates at different spatial locations. Regions with higher effluent concentration receive higher reagent flow rates, while regions with lower concentration receive reduced flow rates. This localized optimization maintains destruction rate efficiency in critical areas while minimizing reagent waste in less critical areas.
Solution Approach 2:
Instead of applying reagent uniformly at high flow rates throughout the entire nozzle perimeter, the system uses partial action by delivering reagent at high flow rates only in specific regions where it is most needed. This selective application reduces overall reagent consumption while maintaining sufficient destruction rate efficiency in the regions requiring treatment.
3Productivity
If the reagent nozzle is positioned close to the inlet nozzle, then reagent delivery efficiency improves, but reagent distribution uniformity decreases
Solution Approach 1:
The system compensates for the non-uniform distribution caused by close positioning by intentionally designing non-uniform aperture distribution in the reagent nozzle. The aperture sizes and densities are varied to create a reagent delivery pattern that, when combined with the close positioning effect, achieves both high delivery efficiency and appropriate spatial distribution matching the effluent stream characteristics.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enhances abatement performance by reducing reagent consumption while maintaining efficiency, aligning reagent supply with effluent stream demands.
Implementation Method 1
The inlet nozzle and the reagent nozzle may be arranged or configured to deliver or convey the reagent into the combustion chamber concentrically with respect to the effluent stream
Implementation Method 2
The reagent may be delivered into the combustion chamber adjacent to the effluent stream
Implementation Method 3
Known radiant burners use combustion to remove the PFCs and other compounds from the effluent gas stream
Implementation Method 4
Fuel gas and air are simultaneously supplied to the foraminous burner to affect combustion at the exit surface. The products of combustion from the foraminous burner react with the effluent stream mixture to combust compounds in the effluent stream
Data Source
Figure 1~2
Figure 3
Figure 4A~4B
AI summary
An inlet assembly, an abatement apparatus and a method are disclosed. The inlet assembly is for an abatement apparatus for treating an effluent stream from a semiconductor processing tool, the inlet assembly comprises: an inlet nozzle configured to deliver the effluent stream into a combustion chamber of the abatement apparatus; and a reagent nozzle configured to deliver a reagent into the combustion chamber of the abatement apparatus, the reagent nozzle being located concentrically with respect to the inlet nozzle, the reagent nozzle being configured to deliver the reagent in different quantities at different positions around its perimeter. In this way, the amount of reagent supplied to the combustion chamber to assist in the abatement of the effluent stream can be varied at different positions or locations around the effluent stream. This enables the flow of the reagent to be matched the flow of the effluent stream discharging from the inlet nozzle into the combustion chamber which provides the correct amount of reagent to suit the effluent stream at different locations which improves the destruction rate efficiency of the abatement apparatus without causing an oversupply of reagent.