Concurrent Ni/Cu Electrode Formation on Silicon via Palladium Activation

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Solution Overview

Problem

Current methods for forming metal electrodes on silicon photovoltaic cells, such as Ni/Cu-based metallization, face challenges including poor thickness uniformity, increased manufacturing costs, and reduced cell efficiency due to requirements for electrical contacting and external power sources, as well as issues with ghost plating and recombination activity.

Innovation Solution

A non-contact plating process involving simultaneous deposition of nickel and copper layers on n-type and p-type silicon regions using immersion plating, followed by electroless plating to achieve uniform metal electrode formation without external power or illumination, reducing damage to the silicon surface and improving electrical characteristics.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If electroless plating is used to deposit Ni layer, then no external power is required, but thickness uniformity is poor

Engineering Contradiction:
Improveno external power requiredVSAvoidthickness uniformity
Core Design Contradiction:
Ease of manufactureVSManufacturing precision

Solution Approach 1:

A palladium-based activation layer is introduced as an intermediary between the silicon substrate and the nickel plating layer. This activation layer promotes uniform nucleation and growth of nickel across the substrate surface, thereby achieving both ease of manufacture (no external power needed) and improved thickness uniformity. The palladium layer acts as a catalyst that enables controlled electroless plating.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The plating parameters are optimized by controlling the composition and temperature of the plating solution, as well as the thickness and properties of the palladium activation layer. These parameter changes enable the electroless plating process to achieve uniform thickness while maintaining the advantage of not requiring external power.

Inventive Principle:
Principle #35Parameter changes

2Manufacturing precision

If conventional plating methods are used, then electrical contacting is required, but device complexity increases

Engineering Contradiction:
Improveplating controlVSAvoidexternal current source required
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The system performs self-service by using the substrate itself as the cathode in the electroless plating process. The palladium activation layer enables the substrate to autonomously reduce nickel ions from the plating solution without requiring external electrical contacting or power sources. This eliminates the complexity of external current sources while maintaining plating control through chemical reaction management.

Inventive Principle:
Principle #25Self-service

3Ease of manufacture

If electroless Cu plating is used, then no external power is required, but deposition rate is very slow

Engineering Contradiction:
Improveno external power requiredVSAvoiddeposition rate
Core Design Contradiction:
Ease of manufactureVSProductivity

Solution Approach 1:

The process ensures continuous and uniform deposition by optimizing the plating solution composition and maintaining appropriate temperature and agitation conditions. The palladium activation layer provides continuous nucleation sites, enabling sustained deposition rate without requiring external power, thus improving productivity while maintaining ease of manufacture.

Inventive Principle:
Principle #20Continuity of useful action

4Reliability

If Ni/Cu-based metallization is used, then cheaper materials are used, but ghost plating occurs

Engineering Contradiction:
Improvematerial cost reductionVSAvoidghost plating
Core Design Contradiction:
ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The palladium activation layer is applied selectively to specific regions of the substrate where metal deposition is desired. This localized activation ensures that nickel and copper plating occur only in the intended areas, preventing ghost plating while maintaining the cost advantage of using Ni/Cu-based metallization instead of traditional silver paste.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This method allows for concurrent formation of metal electrodes with improved thickness uniformity and reduced recombination activity, leading to higher cell efficiency and lower manufacturing costs, while avoiding the need for external power and minimizing ghost plating.

Implementation Method 1

depositing an initial metal layer comprising Ni simultaneously in a first area and in a second area by performing a Ni immersion plating process using a plating solution

Methodology Applied
Scientific EffectImmersion plating: Galvanometer

Implementation Method 2

depositing a further metal layer on the initial metal layer comprising Ni in the first area and in the second area by performing an electroless metal plating process

Methodology Applied
Scientific EffectElectroless plating: Redox Reactions

Data Source

PatentUS11018272B2Methods for forming metal electrodes concurrently on silicon regions of opposite polarity
Publication Date: 2021.05.25 INTERUNIVERSITAIR MICRO ELECTRONICS CENT (IMEC VZW)
  • US11018272B2 patent drawing
  • US11018272B2 patent drawing
  • US11018272B2 patent drawing

AI summary

A method for concurrently forming a first metal electrode (31, 58) on an n-type region of a silicon substrate (10) and a second metal electrode (32, 59) on a p-type region of the silicon substrate, wherein the n-type region and the p-type region are respectively exposed in a first and in a second area, is disclosed. The method comprises: depositing (101) an initial metal layer comprising Ni (33, 53) simultaneously in the first area and in the second area by a Ni immersion plating process using a plating solution; and depositing (102) a further metal layer (34, 54) on the initial metal layer comprising Ni (33, 53) in the first area and in the second area by an electroless metal plating process or by an immersion metal plating process, wherein the plating solution comprises Ni and a predetermined amount of another metal different from Ni.