Condenser Heat Exchanger Layout for Stable Refrigerant Boiling
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Solution Overview
Problem
Existing semiconductor manufacturing cooling systems face challenges in maintaining stable temperature control due to potential cavitation at pump suction portions, pressure fluctuations, and interference between condenser and accumulator outputs, leading to instability and delays in responding to heat generating portion fluctuations.
Innovation Solution
A cooling device with a circulation system that includes a condenser with both liquid and gas phases, a vaporizer, and a heat exchanger, along with a separate circulation system for controlling pressure and temperature within the condenser, allowing for stable refrigerant vaporization and condensation to maintain a constant boiling point and efficient heat recovery.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the circuit is constituted to return fluid from the pump via the evaporator and condenser to the pump, then the fluid can be circulated to cool the heat generating portion, but cavitation occurs at the pump suction portion and pressure fluctuations occur
Solution Approach 1:
The invention introduces an accumulator as an intermediary component between the condenser and the pump. The accumulator stores excess fluid and releases it when needed, acting as a buffer that stabilizes pressure and prevents cavitation at the pump suction portion while maintaining continuous fluid circulation through the evaporator and condenser.
2Reliability
If the fluid pressure is increased at the pump outlet to prevent vaporization, then the fluid is sent to the heat generating portion in a state hard to vaporize, but evaporative cooling is delayed until the temperature rises to the boiling point, causing temperature fluctuations
Solution Approach 1:
The invention changes the pressure parameter dynamically by using the accumulator to regulate fluid pressure. The accumulator allows pressure to decrease when fluid is stored and increase when fluid is released, enabling the fluid to reach the heat generating portion at optimal pressure conditions that facilitate timely evaporative cooling while maintaining temperature control stability.
3Temperature
If heat is recovered from the accumulator to condense the fluid and decrease the pressure of the circulation system, then the pressure of the pump suction portion drops and the risk of cavitation rises
Solution Approach 1:
The invention implements a feedback mechanism where the system monitors pressure conditions and regulates heat recovery from the accumulator accordingly. When pressure at the pump suction portion approaches cavitation risk levels, the heat recovery process is modulated to maintain pressure above the cavitation threshold while still achieving fluid condensation and temperature control.
4Temperature
If heat is supplied to the accumulator to vaporize the fluid and increase the pressure of the circulation system, then the heat balance of the circulation system must be maintained by cooling heat amount control or separate heating means, complicating the arrangement
Solution Approach 1:
The invention makes the accumulator serve multiple functions: it acts as both a fluid storage reservoir and a pressure regulation device, while also participating in heat balance management through controlled heat exchange. This multi-functionality eliminates the need for separate cooling control systems or additional heating means, simplifying the overall arrangement while maintaining the ability to vaporize fluid and increase circulation system pressure when needed.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration enables stable temperature control, reduces control delays, and improves temperature stability by fixing the boiling point and allowing simultaneous pressure and heat exhaustion control, enhancing the responsiveness to heat generating portion fluctuations.
Implementation Method 1
a vaporizer (7) to vaporize the refrigerant (10) by heat from the heat generating portion (80)
Implementation Method 2
a condenser (2) to condense the refrigerant (10)
Implementation Method 3
a pump (3) to send the refrigerant (10) to the vaporizer (7)
Implementation Method 4
a cooling system that includes a heat exchanger (8) arranged in the condenser (2)
Data Source
AI summary
A cooling device includes a circulation system configured to circulate a refrigerant in a condenser so as to return the refrigerant to the condenser via a pump, a heater, a throttle valve, and a vaporizer; and a cooling system that includes a heat exchanger arranged in the condenser. The condenser includes a first portion where the refrigerant is present in a liquid state and a second portion where the refrigerant is present in a gas state, and at least a portion of the heat exchanger is arranged in the second portion.