Conducting Metal Oxide Adhesive Layer for SPR Sensor Sensitivity

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Solution Overview

Problem

Traditional SPR sensor chips with chromium or titanium adhesive layers suffer from reduced sensitivity and reliability due to opaqueness, affecting the detection of biomolecules and gases, especially at the nano scale, where high sensitivity is crucial for biochemical and gas sensing applications.

Innovation Solution

The use of specially processed indium tin oxide and zinc oxide thin films as conducting metal oxide nano layers replaces the traditional chromium or titanium adhesive layers, enhancing light transmission and adhesive force, thereby improving the sensitivity and detection efficiency of SPR sensors by exciting the surface plasmon resonance mechanism.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Strength

If chromium or titanium adhesive layers are used to fix the metal film, then the adhesive force between the metal film and substrate is improved, but the light transmission and SPR sensitivity are reduced due to opaqueness

Engineering Contradiction:
Improveadhesive forceVSAvoidSPR sensitivity
Core Design Contradiction:
StrengthVSMeasurement precision

Solution Approach 1:

The invention changes the material parameter of the adhesive layer from traditional opaque metals (chromium, titanium) to transparent conducting metal oxides (indium tin oxide, zinc oxide). This parameter change maintains the adhesive function while enabling light transmission, thereby resolving the contradiction between adhesive strength and SPR sensitivity.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The invention uses composite material structures where transparent conducting metal oxide layers are combined with metal films (gold, silver, copper) to create a multi-layer configuration. The metal oxide provides both adhesion and optical transparency, while the metal layer provides the necessary plasmonic properties, achieving both strong bonding and high SPR sensitivity.

Inventive Principle:
Principle #40Composite materials

2Ease of manufacture

If traditional metal adhesive layers are used, then the manufacturing process is simple, but the detection sensitivity for trace molecules is reduced

Engineering Contradiction:
Improvemanufacturing simplicityVSAvoiddetection sensitivity
Core Design Contradiction:
Ease of manufactureVSMeasurement precision

Solution Approach 1:

The invention changes the optical parameter of the adhesive layer from opaque to transparent by using conducting metal oxides, which enables trace molecule detection while maintaining relatively simple manufacturing processes through conventional sputtering or deposition techniques.

Inventive Principle:
Principle #35Parameter changes

3Measurement precision

If the metal film thickness is reduced to improve SPR sensitivity, then the detection accuracy is improved, but the adhesive force and structural stability are reduced

Engineering Contradiction:
Improvedetection accuracyVSAvoidadhesive force
Core Design Contradiction:
Measurement precisionVSStrength

Solution Approach 1:

The transparent conducting metal oxide layer acts as an intermediary between the substrate and the metal film. This intermediary layer provides strong adhesion to the substrate, allowing the use of thinner metal films for improved SPR sensitivity while maintaining structural stability through the robust bonding capability of the metal oxide layer.

Inventive Principle:
Principle #24Intermediary (Mediator)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach results in more sensitive and reliable gas and biomolecule detectors with high throughput capabilities, capable of detecting trace amounts of molecules, significantly improving the sensitivity and accuracy of SPR sensor chips.

Implementation Method 1

the surface plasmon resonance (SPR) method can provide an instant measure since SPR does not require pre-labeling

Methodology Applied
Scientific EffectSurface plasmon resonance: Resonance

Implementation Method 2

the penetrating depth of the electric field perpendicular to the interface and the transversal propagation length shows an exponential attenuation by the excitation of a coupler and a polarized electromagnetic wave (TM-wave)

Methodology Applied
Scientific EffectEvanescent wave attenuation: Absorption (EM radiation)

Implementation Method 3

enhancing light transmission and adhesive force, thereby improving the sensitivity and detection efficiency of SPR sensors

Methodology Applied
Scientific EffectLight transmission: Refraction

Implementation Method 4

a method that uses surface plasmon resonance (SPR) for the detection... uses specially processed indium tin oxide and zinc oxide thin films as conducting metal oxide nano layers replaces the traditional chromium or titanium adhesive layers

Methodology Applied
Scientific EffectAdhesion: Adhesive

Data Source

PatentUS7671995B2Method for improving surface plasmon resonance by using conducting metal oxide as adhesive layer
Publication Date: 2010.03.02 NAT TAIWAN UNIV
  • US7671995B2 patent drawing
  • US7671995B2 patent drawing
  • US7671995B2 patent drawing

AI summary

Surface plasmon resonance (SPR) sensing technique which provides high specificity and accuracy has been an important method for molecular sensing technology. In the past, in order to affix 45 nm gold film onto glass or silicon substrate, several nanometers of chromium (Cr) or titanium (Ti) has been used as adhesive layer for the attachment of Au film. However, the existence of Cr or Ti thin film deteriorates the performance of SPR sensor due to their characteristic optical absorption. Our experimental results have confirmed the uses of conducting metal oxide, specifically, ITO and Zinc Oxide (ZnO) can be used to replace Cr or Ti for better performance in terms of SPR resonant properties (resonant angle and HMBW) and sensitivity enhancement for 3 to 15 times than traditional ones. It would contribute significantly to the SPR applications in both biosensors and gas sensors.