Conductive Barrier Film for Interference Filter Metal Film Protection

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Solution Overview

Problem

Variable wavelength interference filters face issues with metal film deterioration due to oxidation, sulfurization, and static electricity accumulation, which affect their long-term reliability and accuracy in controlling the gap between optical films.

Innovation Solution

A barrier film with conductivity is applied to cover the surface and edge portions of the metal film, preventing gas exposure and static electricity accumulation, and is connected to the ground to ensure effective charge release, using materials like indium-based oxides or zinc-based oxides to enhance heat resistance and antistatic properties.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Illumination intensity

If silver is used for the optical film to achieve superior reflectance characteristics and transmissivity, then the optical performance is improved, but the heat resistance and resistance to sulfurization deteriorate, leading to low long-term reliability

Engineering Contradiction:
Improvereflectance characteristics and transmissivityVSAvoidheat resistance and resistance to sulfurization
Core Design Contradiction:
Illumination intensityVSReliability

Solution Approach 1:

The patent replaces the durable but optically inferior metal film (silver) with a less durable but optically superior material (alloy film including carbon). The alloy film is intentionally designed to be sacrificial, providing excellent optical performance while being replaceable if degradation occurs, thus prioritizing optical quality over long-term durability of the metal itself.

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

Solution Approach 2:

The patent uses a composite alloy film consisting of silver mixed with carbon (0.1-10 at%). This composite structure combines the excellent optical properties of silver with the improved heat resistance and sulfurization resistance provided by carbon, achieving a balance between optical performance and reliability.

Inventive Principle:
Principle #40Composite materials

2Ease of manufacture

If the optical film is exposed to various chemicals or gasses in the manufacturing process to enable post-formation processing, then the manufacturing flexibility is improved, but the optical film is easy to be deteriorated, especially when using silver

Engineering Contradiction:
Improvemanufacturing process flexibilityVSAvoidresistance to chemical and gas exposure
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

The alloy film is designed as a sacrificial layer that can withstand the necessary manufacturing process exposures. While not perfectly resistant, its composite structure provides sufficient durability for standard processing, and it can be replaced if severe degradation occurs, enabling manufacturing flexibility without compromising the core optical function.

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

Solution Approach 2:

The carbon-containing alloy film provides enhanced chemical and gas resistance compared to pure silver, while still allowing necessary manufacturing process exposures. The composite structure creates a more robust film that can tolerate post-formation processing chemicals and gasses better than pure metal films.

Inventive Principle:
Principle #40Composite materials

3Reliability

If a carbon film is provided on the surface of the optical film to improve abrasion resistance and antistatic property, then the surface durability is improved, but the carbon film is in an electrically floating state, so complete elimination of static electricity accumulation is not possible

Engineering Contradiction:
Improveabrasion resistance and antistatic propertyVSAvoidstatic electricity accumulation
Core Design Contradiction:
ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The alloy film itself serves multiple functions: it provides the primary optical performance, abrasion resistance, and intrinsic antistatic properties through its carbon content. The film is self-sufficient, eliminating the need for separate protective carbon coating layers while still providing static electricity dissipation capabilities.

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The patent merges the optical film function and the protective/antistatic film function into a single alloy film structure. The carbon-containing alloy film simultaneously provides optical reflectance/transmissivity, abrasion resistance, and static electricity dissipation, combining multiple functions that were previously separated into different layers.

Inventive Principle:
Principle #5Merging (Combining)

4Ease of operation

If the end surfaces of the optical film are exposed to allow access and processing, then the ease of operation is improved, but the end surfaces are exposed to various chemicals or gasses and the filter might be deteriorated

Engineering Contradiction:
Improveaccessibility for processingVSAvoidprotection from chemical and gas exposure
Core Design Contradiction:
Ease of operationVSReliability

Solution Approach 1:

The alloy film is designed to be sufficiently durable to withstand normal handling and processing access, while acknowledging that end surfaces may show signs of wear or exposure. The film's composite structure provides adequate protection for typical operational conditions, and any degradation can be managed through regular maintenance or replacement.

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

Solution Approach 2:

The carbon-containing alloy film provides enhanced protection to end surfaces compared to pure silver films. The composite structure creates a more chemically and physically resilient surface that can tolerate exposure to processing chemicals and gasses while maintaining its optical and structural integrity.

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This solution effectively prevents metal film deterioration, maintains optical characteristics, and allows precise control of the gap between optical films, enhancing the reliability and longevity of the interference filter.

Implementation Method 1

by covering the surface and the end portion of the metal film with the barrier film, it becomes possible to block a gas and so on to be the causes of degradation of the reflectance of the metal film such as oxygen, water, or sulfur

Methodology Applied
Scientific EffectPhysical barrier / Containment: Physical Containment

Implementation Method 2

since the barrier film has the conductivity, it becomes possible to release the charge accumulated on the optical films through the barrier film

Methodology Applied
Scientific EffectElectrical conduction: Conduction (electrical)

Implementation Method 3

it becomes possible to release the charge accumulated on the optical films through the barrier film. Thus, it becomes possible to control the gap between the first optical film and the second optical film with good accuracy

Methodology Applied
Scientific EffectElectrostatic discharge: Electrostatic Discharge

Implementation Method 4

a variable wavelength interference filter used as an interference filter capable of causing multiple interference in the light between a pair of optical reflection films to thereby emit the light with a desired wavelength

Methodology Applied
Scientific EffectOptical interference: Interference

Implementation Method 5

By alloying silver, the resistance of silver to sulfurization and so on can be improved

Methodology Applied
Scientific EffectAlloying: Composite Materials

Data Source

PatentUS9279925B2Interference filter, optical module, and electronic apparatus
Publication Date: 2016.03.08 SEIKO EPSON CORP
  • US9279925B2 patent drawing
  • US9279925B2 patent drawing
  • US9279925B2 patent drawing

AI summary

An interference filter includes a first substrate, a second substrate opposed to the first substrate, a first optical film provided to the first substrate, and a second optical film provided to the second substrate and opposed to the first optical film, at least one of the first and second optical films has a metal film having a reflecting property and a transmitting property with respect to light in a desired wavelength band, a surface and an edge portion of the metal film are covered by a barrier film, and the barrier film is formed of a material having conductivity.