Conductive Beam Optics With Internal Resistive Heating
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Solution Overview
Problem
Ion implanter systems face issues with particle build-up and voltage gradients due to residue accumulation on beam optics, leading to potential contamination and performance degradation.
Innovation Solution
Configuring conductive beam optics with a conductive core, resistive material, and a conductive layer, where current is passed coaxially to heat the optics, reducing particle accumulation while maintaining a uniform voltage field.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If current is passed through the long axis of the electrodes to heat them, then particle generation is reduced, but an undesired voltage gradient is created across the ion beam
Solution Approach 1:
The electrode is segmented into a conductive core element and a resistive material layer disposed around it. This segmentation allows the conductive core to carry heating current while the resistive material converts this current into heat, preventing direct current flow through the entire electrode length that would create voltage gradients across the ion beam.
Solution Approach 2:
The patent employs a nested structure where the conductive core element is positioned at the center, surrounded by the resistive material, which is in turn surrounded by a conductive layer. This nested arrangement allows the inner conductive core to serve as the current path while the outer resistive material generates heat, and the outermost conductive layer maintains electrical connectivity without creating voltage gradients.
2Object-affected harmful factors
If beam-line components are intermittently replaced or manually cleaned, then particle build-up is reduced, but system downtime and operational complexity increase
Solution Approach 1:
The heating element is installed within the beam optics during manufacturing, performing preliminary preparation so that the optics are ready for heating operation. This eliminates the need for later disassembly, cleaning, or replacement operations, maintaining continuous system operation.
Solution Approach 2:
The beam optics perform self-cleaning through the integrated heating element that evaporates particle deposits in situ. This self-service mechanism eliminates the need for external intervention such as manual cleaning or component replacement, thereby maintaining continuous productivity.
3Ease of manufacture
If a simple conductive electrode is used, then manufacturing is easier, but it cannot effectively heat the beam optics without creating voltage gradients
Solution Approach 1:
The electrode is constructed as a composite structure with a conductive core element, a resistive material layer disposed around the core, and an outer conductive layer. This composite design combines materials with different electrical properties to achieve both effective heating through resistive heating and uniform voltage distribution along the beam optics.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach effectively reduces particle build-up and maintains a uniform voltage along the beam optics, preventing contamination and ensuring stable ion beam delivery without introducing undesired voltage gradients.
Implementation Method 1
a resistive material disposed around the conductive core element
Data Source
AI summary
Provided herein are approaches for reducing particles in an ion implanter. In some embodiments, an electrostatic filter of the ion implanter may include a housing and a plurality of conductive beam optics within the housing, the plurality of conductive beam optics arranged around an ion beam-line. At least one conductive beam optic of the plurality of conductive beam optics may include a conductive core element, a resistive material disposed around the conductive core, and a conductive layer disposed around the resistive material.