Conductive Treatment Container Structure for Static-Free Substrate Processing
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Solution Overview
Problem
Triboelectric and inductive charging during substrate treatment lead to contamination and electrostatic arcing in semiconductor and display device manufacturing, as the treatment liquid and container materials cause friction-induced charging.
Innovation Solution
Incorporating a conductive member with lower specific electric resistivity into the treatment container, made of insulating materials like fluorine resin, to suppress the electric potential rise and prevent charging effects, which includes embedding or mounting the conductive member on the container walls or as a mesh body to enhance capacitance and ground the structure.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a treatment container made of insulating material (fluorine resin) is used to prevent corrosion and ensure thermal stability, then chemical resistance and thermal stability are improved, but triboelectric charging occurs due to friction between the treatment liquid and container surface, leading to substrate contamination and electrostatic arcing
Solution Approach 1:
The treatment container is constructed as a composite structure with an insulating material (fluorine resin) base and a conductive member (metal mesh or plate) integrated into the wall portion. This composite design maintains the chemical resistance and thermal stability of the fluorine resin while the conductive member suppresses triboelectric charging, preventing substrate contamination and electrostatic arcing.
2Object-affected harmful factors
If a conductive member is added to the treatment container to suppress electric potential rise, then substrate contamination and arcing are prevented, but the device complexity increases
Solution Approach 1:
The conductive member is embedded within the wall portion of the treatment container, with a nesting recess formed in the wall to accommodate the conductive member. This nested structure integrates the conductive component into the container wall without significantly increasing external dimensions or structural complexity, while still achieving the function of suppressing electric potential rise and preventing substrate contamination.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The conductive member effectively prevents substrate contamination and arcing by suppressing potential increases in the treatment container, maintaining the material properties of the container while reducing induced charging and electrostatic risks during substrate treatment.
Implementation Method 1
triboelectric charging may occur due to friction between the treatment liquid and the surface of the container
Implementation Method 2
resulting in inductive charging on the substrate
Implementation Method 3
enhance capacitance and ground the structure
Implementation Method 4
arcing of static electricity is likely to occur on the substrate
Data Source
AI summary
Provided is a substrate treatment apparatus including a treatment container equipped with a conductive member. The conductive member is made of a material having a lower resistivity than that of the treatment container. The conductive member prevents a rise of an electric potential of the treatment container, which is caused by charging during treatment of a substrate, thereby preventing the substrate from being contaminated and damaged by particles and electrostatic arcing.