Conductive Elastomeric Seal for Semiconductor Chamber Vacuum Integrity
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Solution Overview
Problem
In semiconductor processing chambers, maintaining a vacuum state and minimizing plasma noise is challenging due to issues like O-ring damage and gas leakage caused by scratches on the chamber surfaces during O-ring removal and reinstallation, which affects the integrity of the vacuum and plasma environment.
Innovation Solution
A chamber apparatus with a sealing device comprising a conductive member and an elastomeric member, where the elastomeric member protrudes from the conductive member and is integrated via a tenon-mortise structure, allowing for secure sealing and easy removal without scratching the chamber surfaces, and is designed to maintain a strong structural engagement and effective EMI shielding.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of repair
If O-ring is removed and reinstalled during maintenance, then the sealing device can be serviced, but scratches are caused on the chamber surfaces which compromise vacuum integrity
Solution Approach 1:
The sealing device is divided into two distinct segments: a reusable rigid support structure (conductive member) that remains permanently installed in the chamber, and a replaceable flexible sealing element (elastomeric member/O-ring). This segmentation allows the O-ring to be removed and replaced for maintenance without disturbing the chamber surface, as only the flexible sealing portion is extracted while the rigid support structure stays in place.
Solution Approach 2:
The conductive member acts as an intermediary between the chamber wall and the elastomeric member. It provides a dedicated interface with grooves and recesses that guide the O-ring installation and removal, preventing direct contact between removal tools and the chamber surface, thereby avoiding scratches while enabling easy maintenance.
2Device complexity
If traditional sealing methods are used, then the structure is simple, but plasma noise is not effectively minimized and vacuum state is compromised
Solution Approach 1:
The sealing device combines two different materials with complementary properties: a conductive member (metal or conductive polymer) that provides structural support and EMI shielding, and an elastomeric member (rubber or polymer) that provides flexible sealing. This composite structure simultaneously achieves vacuum tightness, plasma noise reduction, and mechanical durability.
Solution Approach 2:
The conductive member is pre-installed in the chamber with precisely formed grooves and recesses before the elastomeric member is added. This preliminary action creates a prepared interface that ensures proper alignment and sealing when the O-ring is installed, eliminating the need for surface scratching or modification during maintenance operations.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution ensures a reliable air-tight and vacuum-tight seal, reduces plasma noise, and minimizes surface damage during maintenance, thereby improving the yield and operational stability of semiconductor processing.
Implementation Method 1
The elastomeric member is protruded from the conductive member and extended toward the receiving region, and is compressed by the upper and lower chamber bodies so as to seal the chamber enclosure region
Implementation Method 2
designed to maintain a strong structural engagement and effective EMI shielding
Data Source
AI summary
A chamber apparatus comprises a lower and an upper chamber body, and a gasket member. The lower chamber body defines a receiving region and a first receiving groove. The upper chamber body disposed above the lower chamber body and defines a second receiving groove projectively align to the first receiving groove. The second receiving groove is configured to establish sealing coupling with the lower chamber body so as to form a chamber enclosure region. The gasket member includes a conductive member and an elastomeric member. The conductive member configured to laterally surround the receiving region and respectively fit into the lower chamber body and the upper chamber body. The elastomeric member is protruded from the conductive member and extended toward the receiving region, configured to be compressed by the upper and the lower chamber body so as to seal the chamber enclosure region.