Conductive Fluoropolymer Fluid Circuit for ESD Mitigation
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Ultra-pure fluid handling systems in the semiconductor industry face challenges with electrostatic discharge (ESD) due to friction between fluids and components, leading to static charge buildup, which can damage sensitive substrates and cause system failures, and conventional grounding methods result in mechanical clutter and maintenance issues.
Innovation Solution
A fluid circuit with conductive operative components and tubing segments featuring non-conductive polymer portions with interior conductive fluoropolymer stripes, connected through conductive fluoropolymer body portions and fittings, providing a conductive pathway that can be grounded to mitigate ESD.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional grounding methods are used to mitigate ESD, then electrostatic discharge protection is improved, but mechanical clutter and maintenance complexity increase
Solution Approach 1:
The patent combines the grounding function with the existing fluid circuit components by integrating conductive pathways into the tubing segments and operative components. The conductive fluoropolymer stripes are embedded within the tubing structure, and the conductive pathways are formed as integral parts of the operative components, merging ESD mitigation functionality with the fluid handling structure to eliminate separate grounding elements
Solution Approach 2:
The operative components serve dual functions: fluid handling and ESD mitigation. The conductive pathways within the operative components and tubing segments provide both fluid flow pathways and electrical conduction pathways, allowing a single component to perform multiple functions and reduce overall system complexity
2Reliability
If inert polymer materials are used to meet corrosion resistance requirements, then corrosion resistance is improved, but electrostatic charge buildup increases
Solution Approach 1:
The patent uses composite materials that combine inert polymer properties with conductive characteristics. The conductive fluoropolymer stripes are embedded within the non-conductive fluoropolymer tubing, creating a composite structure that maintains the corrosion resistance of the fluoropolymer while providing ESD mitigation through the conductive stripe. Similarly, the operative components use composite constructions with both inert and conductive elements
3Reliability
If conductive pathways are integrated into tubing and components, then ESD mitigation is improved, but manufacturing complexity increases
Solution Approach 1:
The conductive fluoropolymer stripes are pre-formed and then integrated into the tubing manufacturing process. The conductive pathways in operative components are designed to be formed during the molding or fabrication process rather than requiring post-assembly steps. This preliminary preparation of conductive elements simplifies the overall manufacturing by incorporating ESD functionality into base manufacturing operations
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively reduces static charge buildup along the fluid circuit, preventing damage to substrates and system components, while simplifying the grounding process and reducing maintenance complexity.
Implementation Method 1
each tubing segment comprises i) a non-conductive polymer portion defining the fluid passageway and ii) one or more interior conductive fluoropolymer stripes extending axially to ends of each of the respective tubing segments, wherein each operative component body portion comprises a conductive fluoropolymer that extends between each of the plurality of tubing connector fittings
Data Source
Figure 1
Figure 2
Figure 3
AI summary
A fluid circuit includes a plurality of tubing segments and a plurality of operative components. Each tubing segment includes i) a non-conductive polymer portion defining a fluid passageway and ii) one or more interior conductive fluoropolymer stripes extending axially to the ends of each of the respective tubing segments. Each operative component includes a conductive fluoropolymer that extends between a plurality of tubing connector fittings forming a part of the fluid circuit, wherein each of the tubing connector fittings conductively connect the respective conductor of the operative component to the interior conductive fluoropolymer stripes of the tubing segment to provide a path to ground that extends through each operative component and each tubing segment.