Conductive Coating Composition for Glass Electrostatic Holding
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Solution Overview
Problem
Existing electrostatic adsorption methods struggle to effectively hold glass substrates due to the need for higher applied voltages, which is not easily achievable.
Innovation Solution
A composition for forming a glass surface treatment film containing a conductive substance, solvent, and optionally a polymer, which facilitates electrostatic adsorption by reducing the surface resistivity of the glass substrate.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If electrostatic adsorption method is applied to hold a glass substrate, then contactless holding and temperature control are achieved, but higher applied voltage is required compared to semiconductor wafers
Solution Approach 1:
The invention changes the electrical parameter of the glass substrate surface by forming a conductive film that reduces surface resistivity from insulating levels (10^12 Ω/sq or higher) to conductive levels (10^6 to 10^12 Ω/sq). This parameter change enables effective electrostatic adsorption at lower voltages, resolving the contradiction between holding stability and voltage requirement
Solution Approach 2:
The invention creates a composite structure by forming a conductive film layer on the glass substrate surface. This composite material combines the mechanical properties of glass with the electrical conductivity of the conductive substance, enabling both contactless holding and reduced voltage requirements simultaneously
2Reliability
If a conductive film is formed on glass substrate to enable electrostatic adsorption, then holding becomes effective, but additional manufacturing steps and materials are required
Solution Approach 1:
The conductive film serves multiple functions: it enables electrostatic adsorption for contactless holding, provides temperature control capability, and maintains substrate integrity. This multi-functionality justifies the additional manufacturing step by consolidating multiple requirements into a single solution layer
Solution Approach 2:
The invention modifies the surface electrical parameter of the glass substrate through a simple coating process, transforming it from an insulating surface to a conductive surface. This parameter change is achieved through a relatively simple process of applying and heating a conductive composition, making the additional manufacturing step worthwhile
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The composition enables effective electrostatic adsorption of glass substrates by lowering the surface resistivity, allowing for efficient holding and easy removal of the film.
Implementation Method 1
a glass surface treatment film that facilitates electrostatic adsorption onto a glass substrate
Implementation Method 2
The electrostatic adsorption method is a method of holding a workpiece by an electrostatic force based on a potential difference between a workpiece (e.g., a semiconductor wafer) and an electrode (sample stage)
Implementation Method 3
the adsorption head injects air from an air injection hole formed in the head main body toward a glass plate, and sucks, hangs, and holds the glass plate as a workpiece in a non-contact manner while using a negative pressure generated by the flow of the air (i.e., by using the Bernoulli effect)
Data Source
AI summary
This composition for forming a glass surface treatment film includes a conductive substance and a solvent and the glass surface treatment film is used to hold a glass substrate by an electrostatic adsorption method.