Conductive Interface Between Vacuum Chambers in Charged Particle Beam Devices
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Solution Overview
Problem
Charged particle beam devices, such as electron microscopes, face challenges in suppressing external electromagnetic waves during sample delivery, as the shielding member must be opened to facilitate high throughput, leading to measurement errors and reduced reproducibility.
Innovation Solution
A conductive material, such as a conductive sheet or tape, is used to connect the vacuum chamber and the atmosphere-side conductive member, creating a conductive path around the sample delivery path to restrict electromagnetic wave intrusion without obstructing the delivery process.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the shielding member is opened to secure the sample delivery path, then the productivity is improved, but the external electromagnetic waves can intrude into the charged particle beam device
Solution Approach 1:
The shielding structure is divided into multiple segments: the vacuum chamber wall, the conductive material surrounding the opening, and the conductive member on the atmosphere side. These segmented conductive elements work together to maintain shielding effectiveness while allowing the opening to remain accessible for sample delivery.
Solution Approach 2:
The conductive material acts as an intermediary element between the vacuum chamber and the external environment. It provides a conductive path that maintains electromagnetic shielding while allowing the opening to remain open for sample delivery, thus mediating between the conflicting requirements of shielding and accessibility.
2Measurement precision
If the shielding member is closed to block electromagnetic waves, then the measurement precision is improved, but the sample delivery path is obstructed
Solution Approach 1:
The conductive material is strategically positioned around the opening to provide localized electromagnetic shielding exactly where needed. This localized shielding maintains measurement precision without requiring the entire opening to be closed or covered, thus preserving sample delivery accessibility.
3Object-affected harmful factors
If a shielding member is placed over the delivery path to block electromagnetic waves, then the harmful factor is reduced, but the device complexity increases
Solution Approach 1:
The conductive material is integrated with the vacuum chamber structure and the sample delivery mechanism. This merging of functions allows the shielding structure to be part of the existing device architecture rather than an separate additive component, thus reducing overall device complexity while maintaining shielding effectiveness.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution allows for high throughput and improved measurement reproducibility by reducing electromagnetic interference even when the shielding member is in the open state, without increasing processing time or covering the delivery port with shielding material.
Implementation Method 1
a conductive material that surrounds the opening for conduction between the vacuum chamber and a conductive member disposed on the atmosphere side
Data Source
AI summary
An object of the present invention is to provide a charged particle beam device that suppresses the influence of an external electromagnetic wave, even when a shielding member, such as a vacuum valve, is in the open state. To achieve the above object, a charged particle beam device including a vacuum chamber (111) having an opening (104) that surrounds a sample delivery path is proposed. The charged particle beam device includes a conductive material (118) surrounding the opening (104) for conduction between the vacuum chamber (111) and a conductive member (106) disposed on the atmosphere side. According to an embodiment of the present invention, it is possible to restrict an electromagnetic wave (117) from reaching the sample chamber via the delivery path.