Conductive Structure Layout for DRAM Power Rails

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Solution Overview

Problem

As semiconductor devices shrink in size, there is a need for more efficient layouts of conductive structures that can effectively couple circuit components to voltage sources and ground, while minimizing layout area and simplifying fabrication, particularly in semiconductor memory devices like DRAM.

Innovation Solution

The use of a power rail layout with conductive structures that extend across regions, providing shared virtual power and ground rails between mirrored circuits, reducing the need for individual conductive structures and simplifying the layout by using multiple wiring layers to efficiently distribute voltages like VSS and VSSZ.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If individual conductive structures are used to couple each circuit component to voltage sources and ground, then reliable electrical connection is achieved, but layout area increases and fabrication complexity increases

Engineering Contradiction:
Improveelectrical connection reliabilityVSAvoidlayout area
Core Design Contradiction:
ReliabilityVSArea of stationary object

Solution Approach 1:

The patent merges multiple individual conductive structures into shared virtual power and ground rails that serve multiple circuit components simultaneously. The conductive structures are configured to extend across regions and provide shared electrical connections to multiple circuit components, reducing the total number of conductive structures needed and minimizing layout area while maintaining reliable electrical connections.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The conductive structures are designed to perform multiple functions by serving as shared power and ground rails for multiple circuit components. A single conductive structure can couple different circuit components to voltage sources and ground, making the system more efficient and reducing redundancy.

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Reliability

If individual conductive structures are used to couple each circuit component to voltage sources and ground, then reliable electrical connection is achieved, but fabrication complexity increases

Engineering Contradiction:
Improveelectrical connection reliabilityVSAvoidfabrication complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent merges multiple individual conductive structures into shared virtual power and ground rails that serve multiple circuit components simultaneously. The conductive structures are configured to extend across regions and provide shared electrical connections to multiple circuit components, reducing the total number of conductive structures needed and minimizing layout area while maintaining reliable electrical connections.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The conductive structures are designed to perform multiple functions by serving as shared power and ground rails for multiple circuit components. A single conductive structure can couple different circuit components to voltage sources and ground, making the system more efficient and reducing redundancy.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Reliability

If more conductive structures are used to ensure adequate power and ground coupling, then electrical performance is improved, but layout area increases

Engineering Contradiction:
Improveelectrical performanceVSAvoidlayout area
Core Design Contradiction:
ReliabilityVSArea of stationary object

Solution Approach 1:

The patent merges multiple individual conductive structures into shared virtual power and ground rails that serve multiple circuit components simultaneously. The conductive structures are configured to extend across regions and provide shared electrical connections to multiple circuit components, reducing the total number of conductive structures needed and minimizing layout area while maintaining reliable electrical connections.

Inventive Principle:
Principle #5Merging (Combining)

Data Source

PatentUS11075205B2Apparatuses including conductive structures and layouts thereof
Publication Date: 2021.07.27 MICRON TECHNOLOGY INC
  • US11075205B2 patent drawing
  • US11075205B2 patent drawing
  • US11075205B2 patent drawing

AI summary

Embodiments of the disclosure are drawn to arrangements of one or more conductive structures to provide connections to circuits or portions thereof located in different regions of a device. One or more of the conductive structures may include extensions and recesses. The extensions and recesses of different conductive structures may be complementary. That is, the extensions of one conductive structure may extend into a recess of another conductive structure.