Conductive Masking Tape for PVD Grounding and Clean Removal

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Current masking methods for Physical Vapor Deposition (PVD) processes are inefficient, as they either require physical attachment or coating and curing, which are time-consuming and difficult to remove, and do not ensure the masking tape is grounded, leading to potential processing issues and residue left on the substrate.

Innovation Solution

Electrically conductive masking tapes with a conductive backing and pressure-sensitive adhesive layer, comprising an acrylate-based copolymeric matrix, crosslinker, conductive filler, and antioxidant, that adhere strongly to substrates, remain grounded during PVD processes, and can be cleanly removed afterward, even from three-dimensional surfaces.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If physical attachment or coating and curing methods are used for masking, then the masking tape can be securely attached to the substrate, but the process becomes time-consuming and difficult to remove

Engineering Contradiction:
Improveattachment securityVSAvoidprocessing time
Core Design Contradiction:
ReliabilityVSLoss of time

Solution Approach 1:

The adhesive composition is modified by incorporating specific polymers (polyacrylonitrile, polyvinylidene fluoride) and additives (silane-modified polyethylene glycol, phosphoric acid) that change the adhesion parameters to enable strong bonding at lower temperatures, allowing the tape to be applied and removed without time-consuming curing processes

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The traditional mechanical attachment or high-temperature curing methods are replaced with a chemically activated adhesive system that forms strong bonds through chemical reactions at moderate temperatures, enabling secure attachment without prolonged processing time

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

2Ease of operation

If conventional masking tapes are used, then the masking process is simple, but the tape does not ensure proper grounding during PVD, leading to processing issues

Engineering Contradiction:
Improvemasking simplicityVSAvoidgrounding performance
Core Design Contradiction:
Ease of operationVSReliability

Solution Approach 1:

The masking tape is constructed as a composite material system combining conductive polymer adhesive layers with PVD-compatible backing materials, integrating both masking and grounding functions into a single multi-layer structure that maintains electrical conductivity throughout the PVD process

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The adhesive layer serves multiple functions simultaneously: providing mechanical adhesion to the substrate, ensuring electrical grounding during PVD, and maintaining compatibility with the deposition process, eliminating the need for separate grounding measures

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Ease of operation

If conventional masking tapes are used, then the application process is straightforward, but residue is left on the substrate after removal

Engineering Contradiction:
Improveapplication easeVSAvoidsubstrate residue
Core Design Contradiction:
Ease of operationVSObject-generated harmful factors

Solution Approach 1:

The adhesive formulation incorporates specific polymers and additives that change the thermal and chemical parameters of the adhesive, enabling it to bond strongly during processing but decompose cleanly at controlled temperatures during removal, leaving no residue on the substrate

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The potential harm of strong adhesion that causes residue is converted into a benefit by using reversible chemical bonding mechanisms that allow the adhesive to detach cleanly under controlled conditions, transforming the strong bond requirement into a feature that enables clean removal

Inventive Principle:
Principle #22Blessing in disguise (Convert harm into benefit)

4Reliability

If the masking tape uses strong adhesion to ensure grounding, then grounding performance is improved, but clean removal from the substrate becomes difficult

Engineering Contradiction:
Improvegrounding reliabilityVSAvoidremoval ease
Core Design Contradiction:
ReliabilityVSEase of operation

Solution Approach 1:

The adhesive composition uses polymers and additives that change the thermal and chemical properties to provide strong adhesion at processing temperatures for reliable grounding, but allow controlled decomposition and clean removal at elevated temperatures during the stripping phase

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The adhesive bonding characteristics are made dynamic, transitioning from strong adhesion during the PVD process to controlled detachment during removal, allowing the same adhesive layer to provide both secure grounding and easy removal through temperature-dependent property changes

Inventive Principle:
Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The electrically conductive masking tapes ensure proper grounding during PVD, prevent residue formation, and provide a sharp, clean edge, allowing for efficient processing and easy removal without damaging the substrate, thus improving the PVD process by maintaining conductivity and adhesion under harsh conditions.

Implementation Method 1

an electrically conductive pressure sensitive adhesive layer with a first major surface and a second major surface, where the second major surface of the pressure sensitive adhesive layer is in contact with the first major surface of the electrically conductive backing

Methodology Applied
Scientific EffectAdhesion: Adhesive

Implementation Method 2

The pressure sensitive adhesive comprises an acrylate-based copolymeric matrix, a crosslinker, an electrically conductive filler, and at least one antioxidant

Methodology Applied
Scientific EffectCrosslinking: Chemical Bonding

Implementation Method 3

an electrically conductive pressure sensitive adhesive layer... The electrically conductive tape is capable of being laminated to and cleanly removed from a substrate surface

Methodology Applied
Scientific EffectElectrical conduction: Conduction (electrical)

Data Source

PatentUS20230002646A1Electrically conductive masking tape
Publication Date: 2023.01.05 3M INNOVATIVE PROPERTIES CO
  • US20230002646A1 patent drawing

AI summary

Electrically conductive masking tapes include an electrically conductive backing and an electrically conductive pressure sensitive adhesive layer. The pressure sensitive adhesive contains an acrylate-based copolymeric matrix, a crosslinker, an electrically conductive filler, and at least one antioxidant. The acrylate-based copolymeric matrix is the reaction product of a polymerizable mixture including at least one first alkyl(meth)acrylate monomer with a homopolymer Tg of less than −50° C., and at least one hydroxyl-functional alkyl(meth)acrylate with a homopolymer Tg of less than −10° C. The electrically conductive tape is capable of being laminated to and cleanly removed from a substrate surface, after being subjected to harsh conditions such as plasma vapor deposition conditions.