Conductive Microfluidic Channel for Acoustic Wave Alignment
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Solution Overview
Problem
Current microfluidic devices face challenges in precisely aligning electrodes and control target fluid regions, requiring complex and expensive processes, which complicates the generation and control of surface acoustic waves for biological applications, such as particle separation and diagnosis.
Innovation Solution
A microfluidic device with a conductive microfluidic channel and a flexible substrate that generates acoustic waves without the need for additional electrodes, allowing for precise alignment and adjustment of acoustic waves based on the control target, using a conductive material and a piezoelectric substrate, and a simplified manufacturing process.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If separate patterning processes are used for electrodes and control target fluid regions, then manufacturing flexibility is maintained, but alignment precision between electrode patterns and control target channel patterns deteriorates
Solution Approach 1:
The patent combines the electrode pattern and control target channel pattern into a single integrated pattern structure. The conductive material is deposited to form both the electrode and the channel pattern simultaneously through one photolithography process, eliminating the need for separate patterning steps and ensuring precise alignment between components.
Solution Approach 2:
The conductive material layer serves multiple functions: it acts as both the electrode for generating surface acoustic waves and as the structural definition for the control target channel. This multi-functional design allows a single patterning process to achieve both electrical functionality and fluidic channel geometry with precise alignment.
2Manufacturing precision
If complex bonding processes with oxygen plasma and high magnification microscopy are used, then alignment precision is improved, but device complexity and manufacturing cost increase
Solution Approach 1:
The patent extracts and eliminates the complex bonding process steps (oxygen plasma treatment, high magnification microscopy, ethanol spraying) by integrating the electrode and channel patterns into a single structure. The simplified design allows direct bonding without requiring sophisticated alignment equipment or multiple processing steps.
Solution Approach 2:
Instead of using complex bonding processes to achieve alignment after separate patterning, the patent inverts the approach by achieving alignment through single-step integrated patterning. The precision is built into the pattern design itself rather than being achieved through complex post-processing alignment steps.
3Reliability
If additional metal deposition and patterning processes are used for electrodes, then electrode performance is improved, but manufacturing cost and environmental impact increase
Solution Approach 1:
The conductive material layer performs dual functions as both the electrode for acoustic wave generation and as the structural template for the control channel. This eliminates the need for separate metal deposition processes that would be required for traditional electrode fabrication, reducing manufacturing cost and environmental impact.
Solution Approach 2:
The electrode formation and channel pattern definition are merged into a single deposition and patterning operation. The same conductive material layer that forms the electrode also defines the channel geometry, eliminating redundant manufacturing steps and reducing overall material usage.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach enables the efficient and cost-effective generation of acoustic waves for controlling micro- and nano-sized particles, enhancing the reliability and flexibility of the device for various biological applications, including particle separation and diagnosis, while reducing the need for expensive equipment and complex processes.
Implementation Method 1
a piezoelectrical material that allows mutual conversion of electro-mechanical energy is used. Accordingly, once electrical energy is applied to the piezoelectric material, the piezoelectrical material may mechanically shrink or expand
Implementation Method 2
When a frequency corresponding to an interval between the electrodes and an alternating current (AC) voltage are applied to the electrodes, a surface acoustic wave that travels the surface of the piezoelectrical material may be generated
Data Source
AI summary
The present invention relates to a microfluidic device and a manufacturing method therefore and, more particularly, to a microfluidic device comprising: a first substrate layer; a second substrate layer formed on at least one surface of the first substrate layer; and a plurality of transducers formed on the surface of the first substrate layer and embedded in the second substrate layer, wherein the transducer comprises a conductive microfluidic channel. The present invention can provide an elastic wave substrate microfluidic device capable of controlling an elastic wave according to a property of a microparticle and capable of being manufactured without expensive equipment and complicated process procedures.