Conductive Nanonetwork Fabrication Using a Sacrificial Layer Template

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Solution Overview

Problem

Existing conductive nanofilms using metal nanowires suffer from high surface roughness and contact resistance due to overlapping nanowires, requiring costly and unsuitable post-processing treatments, and are limited by substrate hydrophobicity in solution processes.

Innovation Solution

A fabrication method using a sacrificial layer to form conductive nanonetworks by forming nanowire networks, applying a sacrificial layer, removing the nanowires, and filling the voids with a conductive material, allowing control over line width, density, and height through adjustable nanowire and sacrificial layer parameters.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If metal nanowires are randomly distributed through solution process to form conductive nanofilm, then the fabrication process is simple and low cost, but the nanowires overlap on one another causing high contact resistance and high surface roughness

Engineering Contradiction:
Improvefabrication process simplicityVSAvoidsurface roughness and contact resistance
Core Design Contradiction:
Ease of manufactureVSManufacturing precision

Solution Approach 1:

The invention segments the conductive material into discrete nanowire units that are precisely positioned through the sacrificial layer template, rather than relying on random distribution. This segmentation allows each nanowire to be placed in a controlled manner, eliminating overlaps while maintaining the simplicity of solution-based fabrication.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The sacrificial layer acts as an intermediary template that guides the positioning of conductive nanowires. By using this intermediate structure, the invention achieves precise nanowire placement without complex direct manipulation techniques, resolving the contradiction between simple fabrication and high precision positioning.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Reliability

If post-processing treatment such as heat treatment or laser treatment is applied to reduce contact resistance between metal nanowires, then contact resistance is reduced, but the process becomes unsuitable for flexible polymer substrates and increases device complexity

Engineering Contradiction:
Improvecontact resistanceVSAvoidprocess complexity and substrate compatibility
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The invention performs preliminary action by pre-positioning the nanowires through the sacrificial layer template before final conductive material deposition. This preliminary positioning ensures optimal nanowire arrangement that minimizes contact resistance from the outset, eliminating the need for subsequent heat treatment or laser processing steps.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The sacrificial layer template system enables self-service positioning of nanowires during the fabrication process itself. The template automatically guides nanowire placement into optimal configurations, making the system self-sufficient in achieving low contact resistance without requiring external post-processing interventions.

Inventive Principle:
Principle #25Self-service

3Reliability

If ITO is used for nanoelectrodes to achieve high optical transmittance and low sheet resistance, then electrical and optical properties are excellent, but the oxide brittleness makes it unsuitable for flexible electrodes and the vacuum deposition process is expensive

Engineering Contradiction:
Improveelectrical and optical propertiesVSAvoidflexibility and cost
Core Design Contradiction:
ReliabilityVSAdaptability or versatility

Solution Approach 1:

The invention changes the material parameter from brittle oxide (ITO) to flexible metallic nanowires while maintaining the functional parameters of electrical conductivity and optical transmittance. This parameter change enables the electrode to be adapted for flexible substrates and reduces fabrication cost by using solution-based processes instead of vacuum deposition.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The invention uses composite materials by combining metallic nanowires with a sacrificial layer template system. This composite approach allows the final structure to exhibit both the excellent electrical/optical properties of metals and the flexibility required for flexible electronics, overcoming the limitations of pure ITO.

Inventive Principle:
Principle #40Composite materials

Data Source

PatentUS12412678B2Fabrication method of conductive nanonetworks through adaptation of sacrificial layer
Publication Date: 2025.09.09 KOREA ADVANCED INST OF SCI & TECH
  • US12412678B2 patent drawing
  • US12412678B2 patent drawing
  • US12412678B2 patent drawing

AI summary

There is provided a fabrication method of conductive nanonetworks through adaptation of a sacrificial layer includes: forming nanowire networks on a substrate; forming the sacrificial layer on a front surface of the substrate including the nanowire networks; removing the nanowire networks to expose a surface of the substrate within a region from which the nanowire networks are removed; forming a conductive material on the front surface of the substrate to fill the region, from which the nanowire networks are removed, with the conductive material while forming the conductive material on the sacrificial layer; and forming conductive nanonetworks made of the conductive material which fills the region from which the nanowire networks are removed, by removing the sacrificial layer.