Conductive Open Cell Vapor Source for OLED Deposition

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Solution Overview

Problem

Existing vapor deposition methods face challenges in maintaining stable deposition rates for organic materials, particularly in OLED devices, due to thermal decomposition risks and variability in metering and vaporizing minute powder quantities, which leads to contamination and inefficiencies in material handling and purification.

Innovation Solution

A conductive open cell structure is used as an intermediate vapor deposition receptacle to decouple deposition rate stability from variability in replenishment flux, allowing for precise and invariant vapor flux through phase change from gas to solid, reducing thermal exposure and contamination risks.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a crucible is filled with hundreds of grams of material and heated to achieve stable deposition rate, then deposition rate stability is improved, but thermal decomposition risk increases due to extended exposure to high temperatures

Engineering Contradiction:
Improvedeposition rate stabilityVSAvoidthermal decomposition
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The patent divides the vapor deposition process into two distinct stages: (1) a flash vaporization stage where a small amount of material is rapidly vaporized in seconds, and (2) a sustained deposition stage where the vapor cloud continues to deposit material stably. This segmentation allows the material to be exposed to high temperature only briefly during flash vaporization, then deposited at lower temperatures, resolving the contradiction between deposition stability and thermal decomposition risk

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The system employs periodic flash vaporization cycles where material is introduced in short bursts rather than continuous heating. Each cycle consists of a rapid vaporization pulse followed by a deposition phase, creating a periodic action pattern that limits thermal exposure time while maintaining overall deposition rate stability through repeated cycles

Inventive Principle:
Principle #19Periodic action

2Object-affected harmful factors

If powdered organic material is metered to a heated element on an as-needed basis to reduce thermal exposure time, then thermal decomposition risk is reduced, but variability in vapor generation rate increases due to particle size and packing density variations

Engineering Contradiction:
Improvethermal decompositionVSAvoidvapor generation rate stability
Core Design Contradiction:
Object-affected harmful factorsVSReliability

Solution Approach 1:

The patent incorporates a feedback control system that monitors the deposition rate in real-time and adjusts the flash vaporization parameters accordingly. The crystal rate monitor provides feedback to the control system, which then modulates the vaporization pulse duration and intensity to compensate for variations in powder properties, maintaining stable deposition rates despite particle size and packing density variations

Inventive Principle:
Principle #23Feedback

Solution Approach 2:

The system dynamically changes operating parameters including vaporization temperature, pulse duration, and carrier gas flow rate to optimize vapor generation. By adjusting these parameters based on material properties and deposition requirements, the system compensates for powder variability while maintaining controlled thermal exposure

Inventive Principle:
Principle #35Parameter changes

3Manufacturing precision

If precise metering of fine powders is attempted to control deposition rate, then deposition precision is improved, but material handling complexity increases due to adhesion and agglomeration tendencies

Engineering Contradiction:
Improvedeposition rate precisionVSAvoidmaterial handling system
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent extracts the material handling complexity from the deposition control system by using a simple flash vaporization approach. Instead of complex metering mechanisms to precisely control powder feed rates, the system simply introduces small amounts of powder and relies on rapid flash vaporization to convert the powder to vapor, from which precise deposition is then controlled by vaporization parameters rather than mechanical metering

Inventive Principle:
Principle #2Taking out (Extraction)

4Reliability

If solid pellets are used instead of powders to reduce handling variability, then material handling precision is improved, but additional processing steps are required including grinding to sub micron sizes and addition of inert binders

Engineering Contradiction:
Improvematerial feed consistencyVSAvoidpellet preparation process
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent inverts the conventional approach by using powders directly without converting them to pellets. Instead of aggregating powders into solid forms requiring complex preparation, the system exploits the rapid flash vaporization capability to vaporize powders directly. This inversion eliminates the pellet preparation complexity while achieving consistent material feed through controlled vaporization of the powder cloud

Inventive Principle:
Principle #13The other way round (Inversion)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach achieves stable deposition rates with reduced thermal exposure and contamination, enabling efficient and precise vaporization of organic materials for OLED devices by controlling temperature, surface area, and pressure, resulting in high-purity films with improved device performance and longevity.

Implementation Method 1

allowing for precise and invariant vapor flux through phase change from gas to solid

Methodology Applied
Scientific EffectPhase change: Phase Change

Implementation Method 2

a source material is heated to a temperature so as to cause vaporization and a vapor plume is created

Methodology Applied
Scientific EffectVaporization: Evaporation

Implementation Method 3

a vapor plume is created that mixes with and is transported by an inert carrier gas

Methodology Applied
Scientific EffectMixing: Diffusion

Implementation Method 4

where the organic material condenses to form a thin film

Methodology Applied
Scientific EffectCondensation: Condensation

Data Source

PatentEP2723912B1Vapor deposition material source and method for making same
Publication Date: 2018.05.30 AIXTRON AG
  • EP2723912B1 patent drawingFigure 1~2
  • EP2723912B1 patent drawingFigure 3~4
  • EP2723912B1 patent drawingFigure 4a

AI summary

A vapor deposition material source and method for forming a vapor deposition material source for use in a vapor deposition process comprising a conductive three-dimensional, open cell, reticulated structure; and a solid coating of a selected vapor deposition material vapor deposited onto the conductive three-dimensional, open cell, reticulated structure by vapor deposition.