Conductive Oxide Capacitor Electrodes in Display Manufacturing
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional display device manufacturing methods require additional metal and insulation layers for forming capacitor electrodes, which complicates the process and reduces efficiency.
Innovation Solution
The use of conductive oxide materials for forming capacitor electrodes, integrated into the active pattern formation process, eliminates the need for separate metal and insulation layers, enhancing manufacturing efficiency by forming the capacitor electrode during the active pattern process.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If additional metal and insulation layers are used for forming capacitor electrodes, then the capacitor electrode formation is achieved, but the manufacturing process becomes complicated and efficiency is reduced
Solution Approach 1:
The patent merges the capacitor electrode formation process with the active pattern formation process by using the same conductive oxide layer for both purposes. The conductive oxide layer serves dual functions: forming the active pattern (channel, source, drain) and forming the capacitor electrode, thereby eliminating the need for separate metal and insulation layers that would otherwise be required for capacitor electrode formation.
Solution Approach 2:
The conductive oxide layer is designed to perform multiple functions simultaneously. It serves as both the active semiconductor layer (providing channel, source, and drain regions) and as the capacitor electrode material. This multi-functionality reduces the total number of layers and process steps required in the manufacturing process.
2Reliability
If additional metal and insulation layers are used for forming capacitor electrodes, then the capacitor electrode formation is achieved, but manufacturing efficiency is reduced
Solution Approach 1:
The patent combines the capacitor electrode formation with the active pattern formation into a single integrated process. By using the same conductive oxide layer deposition and patterning steps for both the active pattern and capacitor electrode, the manufacturing process is streamlined, reducing the number of process cycles and improving overall productivity.
Solution Approach 2:
The conductive oxide layer is formed and patterned in advance to create both the active pattern and the capacitor electrode structure simultaneously. This preliminary action eliminates the need for subsequent separate processes to form the capacitor electrode, thereby enhancing manufacturing efficiency.
3Quantity of substance
If conductive oxide materials are used for forming capacitor electrodes, then material requirements are reduced, but the integration with active pattern process must be achieved
Solution Approach 1:
The conductive oxide layer is designed to serve dual purposes: as the active semiconductor layer and as the capacitor electrode material. This universality reduces material requirements by eliminating the need for separate metal and insulation layers, while the process integration is achieved through unified deposition and patterning steps that treat both functions equally.
Data Source
AI summary
According to some embodiments of the present disclosure, a display device includes an active pattern including a metal oxide, a gate electrode overlapping the active pattern, a first capacitor electrode spaced apart from the active pattern and including a conductive oxide, and a second capacitor electrode on the first capacitor electrode.