Conductive Pattern Electrode Positioning for TEM Samples

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Solution Overview

Problem

Existing sample holders and carriers for Transmission Electron Microscopy (TEM) have fixed points of connectivity, limiting flexible and accurate positioning of electrodes for inducing voltage or current, which is time-consuming and may cause high current density issues.

Innovation Solution

A method involving the application of a conductive or semi-conductive pattern on the sample and sample carrier using techniques like inkjet printing or beam-induced deposition to create high-resolution electric connections from the electrodes to specific regions of interest, allowing for precise and flexible positioning.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If fixed points of connectivity are used in sample holders and carriers, then the structure is simple and robust, but the positioning of electrodes for inducing voltage or current is limited in flexibility and accuracy

Engineering Contradiction:
Improvepositioning flexibilityVSAvoidstructure complexity
Core Design Contradiction:
Ease of operationVSDevice complexity

Solution Approach 1:

The patent transforms the fixed, static connectivity points into a dynamic system where conductive patterns can be applied at variable positions on the sample carrier. This allows the electrode positioning to be adjusted and optimized for different experimental requirements while maintaining a relatively simple overall structure.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The invention changes the parameter of electrode position from fixed to variable by applying conductive patterns at different locations. This enables continuous adjustment of the connectivity points without changing the fundamental structure of the sample holder or carrier.

Inventive Principle:
Principle #35Parameter changes

2Manufacturing precision

If fixed points of connectivity are used in sample holders and carriers, then the design is straightforward, but accurate positioning of electrodes to specific regions of interest is time-consuming

Engineering Contradiction:
Improveelectrode positioning accuracyVSAvoidsetup time
Core Design Contradiction:
Manufacturing precisionVSLoss of time

Solution Approach 1:

The patent applies conductive patterns directly onto the sample carrier before placing the sample. This preliminary action establishes the electrode positions in advance, allowing for precise alignment with regions of interest on the sample without time-consuming adjustments during sample installation.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The invention replaces the mechanical adjustment of electrode positions with a deposition-based approach. Instead of physically moving or adjusting mechanical components, the conductive patterns are applied using deposition techniques, which enables higher precision and faster setup.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Reliability

If fixed points of connectivity are used, then the sample holder construction is simple, but high current density issues may occur due to limited positioning options

Engineering Contradiction:
Improvecurrent density distributionVSAvoidelectrode configuration
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent enables different regions of the sample carrier to have different electrical properties by applying conductive patterns selectively. This allows optimization of current density distribution in specific local areas where samples are positioned, preventing unwanted high current density while maintaining simple overall construction.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables easy and accurate positioning of electrodes with sub-micron resolution, reducing the time required for setup and minimizing unwanted high current density, thereby improving the precision and efficiency of TEM inspections.

Implementation Method 1

Some of the electrons are absorbed in the sample, some are elastically scattered (that is: their direction is changed while their energy is hardly changed)

Methodology Applied
Scientific EffectElastic scattering: Scattering

Implementation Method 2

some are inelastically scattered (that is: their direction and energy are changed)

Methodology Applied
Scientific EffectInelastic scattering: Scattering

Implementation Method 3

gathering secondary electrons emitted by the sample in response to the irradiation by the primary beam. Such secondary electrons typically have an energy between 0-50 eV

Methodology Applied
Scientific EffectSecondary electron emission:

Implementation Method 4

photons, such as X-rays, are generated by the bombardment of the sample with the primary beam

Methodology Applied
Scientific EffectX-ray generation: X-Ray

Data Source

PatentEP2278307B1Method for inspecting a sample
Publication Date: 2015.09.02 FEI CO
  • EP2278307B1 patent drawingFigure 1a~2b
  • EP2278307B1 patent drawingFigure 3~4a
  • EP2278307B1 patent drawingFigure 4b~5a

AI summary

The invention describes a method for inspecting samples in an electron microscope. A sample carrier 500 shows electrodes504, 507 connecting pads 505, 508 with areas A on which the sample is to be placed. After placing the sample on the sample carrier, a conductive pattern is deposited on the sample, so that voltages and currents can be applied to localized parts of the sample. Applying the pattern on the sample may be done with, for example, Beam Induced Deposition or ink-jet printing. The invention also teaches building electronic components, such as resistors, capacitors, inductors and active elements such as FET's in the sample.