Conductive PFA Nozzle for SPM Resist Removal
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Solution Overview
Problem
Existing substrate processing apparatuses face challenges in efficiently removing resist using Sulfuric acid Hydrogen Peroxide Mixture (SPM) due to charge buildup and corrosion issues during high-temperature processing.
Innovation Solution
A substrate processing apparatus with a nozzle unit featuring a multi-layered structure, including a corrosion-resistant resin first layer, a rigid stainless steel second layer, and a corrosion-resistant resin third layer, where the nozzle tip is made of conductive PFA material to neutralize charges and prevent corrosion, ensuring effective discharge of SPM.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Strength
If the nozzle unit is made of rigid material to maintain structural integrity, then the mechanical strength is improved, but corrosion resistance deteriorates due to exposure to sulfuric acid hydrogen peroxide mixture
Solution Approach 1:
The nozzle unit employs a composite structure combining rigid material (stainless steel) for mechanical strength and corrosion resistant resin (PFA) for chemical resistance. The rigid material provides structural integrity while the corrosion resistant resin coating protects against sulfuric acid hydrogen peroxide mixture corrosion, resolving the contradiction between strength and corrosion resistance.
Solution Approach 2:
The corrosion resistant resin layer is nested on the surface of the rigid material nozzle body. This layered structure allows the rigid material to provide structural support while the resin layer provides corrosion protection, effectively combining the advantages of both materials.
2Reliability
If the nozzle unit is made of corrosion resistant resin to prevent corrosion, then corrosion resistance is improved, but charge buildup worsens due to insulating properties
Solution Approach 1:
The composite structure of rigid material and corrosion resistant resin creates a material system that balances corrosion resistance with electrical conductivity. The rigid material component provides conductive pathways to dissipate charges while the resin component maintains corrosion resistance.
Solution Approach 2:
Different regions of the nozzle unit have different material compositions optimized for their specific functions. The nozzle body uses composite material for overall protection, while specific conductive portions are designed to address charge buildup in critical areas.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus effectively neutralizes charges and provides corrosion resistance, enhancing the efficiency and reliability of resist removal using SPM, while maintaining the integrity of the processing equipment.
Implementation Method 1
The nozzle tip is formed of a corrosion resistant resin having conductivity
Data Source
AI summary
A substrate processing apparatus includes a nozzle unit. The nozzle unit includes a line and a nozzle tip provided on a tip end of the line. The line includes a first layer, a second layer and a third layer. The nozzle tip is formed of a corrosion resistant resin having conductivity. The third layer is configured to cover the first layer and the second layer from outside and cover a part of the nozzle tip from outside.