Conductive Pillar Package Structure for Low-Temperature Bonding

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Solution Overview

Problem

Conventional semiconductor packaging techniques face issues with bonding surface separation due to fatigue, reliability problems from defective solder, high contact resistance, and complex manufacturing processes, especially with copper structures requiring high temperatures and pressures, and incomplete underfill coverage affecting bonding quality.

Innovation Solution

A package structure and bonding method using conductive pillars and an adhesive layer between substrates, which reduces process requirements, manufacturing costs, and improves bonding quality by allowing low-temperature bonding with reduced stress and eliminating the need for chemical polishing and annealing, while ensuring favorable electrical connections and sealing protection.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Strength

If copper structure bonding is used to conduct bonding between chip and package carrier, then bonding strength is improved, but process complexity and manufacturing cost increase due to high temperature (300-450°C), high pressure (300 MPa), annealing process, and chemical polishing requirements

Engineering Contradiction:
Improvebonding strengthVSAvoidprocess complexity
Core Design Contradiction:
StrengthVSDevice complexity

Solution Approach 1:

The patent changes the bonding parameters from high temperature (300-450°C) and high pressure (300 MPa) to low temperature and atmospheric pressure conditions. This is achieved by using a press-fitting method with conductive pillars that require minimal thermal and mechanical energy, thereby simplifying the overall bonding process while maintaining strong electrical and mechanical connections.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent extracts and eliminates unnecessary process steps from the conventional copper bonding method. Specifically, it removes the annealing process and chemical polishing steps by using conductive pillars with inherently flat surfaces that can be directly press-fitted without additional thermal treatment or surface preparation, significantly reducing process complexity.

Inventive Principle:
Principle #2Taking out (Extraction)

2Manufacturing precision

If chemical polishing process is used to obtain flat surface on copper structure, then bonding quality is improved, but manufacturing cost and process complexity increase

Engineering Contradiction:
Improvesurface flatnessVSAvoidmanufacturing cost
Core Design Contradiction:
Manufacturing precisionVSEase of manufacture

Solution Approach 1:

The patent removes the chemical polishing step entirely from the manufacturing process. The conductive pillars are designed with inherently flat surfaces through the press-fitting method, eliminating the need for costly and complex chemical polishing processes while achieving the required surface flatness for high-quality bonding.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent uses a simple, cost-effective press-fitting method that creates sufficiently flat surfaces without requiring expensive chemical polishing equipment or materials. The conductive pillars are designed to achieve functional flatness through the bonding process itself, reducing manufacturing costs while maintaining adequate bonding quality.

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

3Volume of moving object

If underfill is used after bonding to reduce package size and refine contact points, then package compactness is improved, but bonding reliability may be reduced due to incomplete coverage of contact points

Engineering Contradiction:
Improvepackage sizeVSAvoidbonding reliability
Core Design Contradiction:
Volume of moving objectVSReliability

Solution Approach 1:

The patent performs the surface preparation and contact point formation actions before the bonding process itself. The conductive pillars are pre-formed with flat surfaces and precise geometries that ensure complete contact point coverage during press-fitting, eliminating the need for post-bonding underfill application and the reliability issues associated with incomplete coverage.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The conductive pillars serve as intermediaries that provide both mechanical support and electrical connection while ensuring complete contact between substrates. Their flat surfaces and precise geometries act as mediators that guarantee full contact point coverage, making the underfill process unnecessary and preventing reliability issues from incomplete coverage.

Inventive Principle:
Principle #24Intermediary (Mediator)

4Reliability

If solder balls are used for bonding, then electrical connection is achieved, but bonding surface separation occurs due to long-term fatigue and reliability issues arise from defective solder

Engineering Contradiction:
Improveelectrical connection reliabilityVSAvoidlong-term bonding durability
Core Design Contradiction:
ReliabilityVSDuration of action of stationary object

Solution Approach 1:

The patent replaces solder balls with conductive pillars made of copper or copper alloys that are integrated into the substrate structure. These pillars provide permanent, fatigue-resistant electrical connections that do not suffer from the long-term reliability issues and defective solder problems associated with traditional solder ball bonding methods.

Inventive Principle:
Principle #27Cheap short-living objects (Disposable)

Solution Approach 2:

The conductive pillars are made of copper or copper alloys that combine excellent electrical conductivity with high mechanical strength and fatigue resistance. This composite material approach provides both reliable electrical connection and long-term bonding durability, overcoming the limitations of traditional solder ball materials.

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The method achieves strong and reliable bonding with improved electrical properties and reduced manufacturing complexity, enhancing the quality and reliability of the package structure through low-temperature assembly and simplified processing steps.

Implementation Method 1

an adhesive layer is disposed between the first substrate and the second substrate... The adhesive layer fills gaps between the conductive pillars

Methodology Applied
Scientific EffectAdhesion: Adhesive

Implementation Method 2

Each of the conductive pillars electrically connects the pads and the second substrate... each of the conductive pillars electrically connects each of the dimples

Methodology Applied
Scientific EffectElectrical conduction: Conduction (electrical)

Implementation Method 3

bonding between chip and package carrier in a press-fitting manner... suitable for a low temperature bonding assembly

Methodology Applied
Scientific EffectMechanical pressure: Pressure Increase

Data Source

PatentUS10756050B2Package structure and bonding method thereof
Publication Date: 2020.08.25 UNIMICRON TECH CORP
  • US10756050B2 patent drawing
  • US10756050B2 patent drawing
  • US10756050B2 patent drawing

AI summary

A package structure includes a first substrate, a second substrate, a plurality of conductive pillars and an adhesive layer. The first substrate includes a plurality of vias and a plurality of pads. The pads are disposed on the first substrate, and fill the vias. The second substrate is disposed opposite to the first substrate. Each conductive pillar electrically connects each pad and the second substrate, and the adhesive layer fills the gaps between the conductive pillars. A bonding method of the package structure is also provided.