Conductive Pipe Deterioration Detection in Substrate Processing

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Solution Overview

Problem

Existing substrate processing systems face challenges in accurately determining the deterioration degree of conductive pipes used for supplying processing liquids, which can lead to reduced conductivity and increased risk of electrostatic damage or flammable liquid ignition.

Innovation Solution

A substrate processing apparatus equipped with a deterioration degree measuring unit that includes a measurement liquid supply, a potential difference imparting unit, and an ammeter to measure the current flowing through a charge moving path established via the measurement liquid, allowing for the detection of conductivity deterioration in conductive pipes.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a conductive pipe is used to supply processing liquid, then electrostatic damage and flammable liquid ignition are prevented, but conductivity deteriorates over time due to friction with processing liquid

Engineering Contradiction:

Improveelectrostatic protectionVSAvoidservice life

Core Design Contradiction:

ReliabilityVSDuration of action of stationary object

Solution Approach 1:

The invention performs preliminary measurement of conductivity before the conductive pipe reaches critical deterioration. By continuously monitoring conductivity and comparing it against predetermined thresholds, the system proactively identifies when the pipe needs replacement before electrostatic protection fails, preventing both safety hazards and unexpected downtime.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The invention implements a feedback mechanism where conductivity measurements are continuously taken, compared against thresholds, and used to trigger replacement decisions. The measurement unit provides real-time feedback on the conductive pipe's condition, enabling dynamic adjustment of maintenance schedules based on actual degradation rates rather than fixed time intervals.

Inventive Principle:

Principle #23Feedback

2Measurement precision

If conductivity measurement is performed frequently to detect deterioration early, then timely replacement is enabled, but measurement time and system complexity increase

Engineering Contradiction:

Improvedeterioration detection accuracyVSAvoidmeasurement time

Core Design Contradiction:

Measurement precisionVSLoss of time

Solution Approach 1:

The invention uses a simplified measurement approach that applies partial action - measuring conductivity at discrete intervals rather than continuously, and using a single predetermined threshold rather than multiple detailed thresholds. This provides sufficient detection accuracy for maintenance decisions without requiring excessive measurement time or complex analysis.

Inventive Principle:

Principle #16Partial or excessive action

3Productivity

If a simple measurement method is used, then measurement time is reduced, but measurement precision deteriorates

Engineering Contradiction:

Improvemeasurement efficiencyVSAvoidconductivity measurement accuracy

Core Design Contradiction:

ProductivityVSMeasurement precision

Solution Approach 1:

The invention replaces complex mechanical or manual measurement methods with an electrical measurement system. By using electrical conductivity measurement through the conductive pipe itself, the system achieves high measurement precision quickly and automatically, eliminating time-consuming manual inspection methods while maintaining accurate detection of deterioration.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution enables accurate and efficient detection of conductivity deterioration in conductive pipes, allowing for timely replacement and preventing unnecessary costs and potential hazards associated with deteriorated pipes.

Implementation Method 1

measures a current value of a current flowing through a charge moving path established via the measurement liquid between the liquid contact surface of the liquid receiver and the ground line

Methodology Applied

Scientific EffectElectrical Conduction: Conduction (electrical)

Implementation Method 2

a potential difference imparting unit that imparts a potential difference between a liquid contact surface of the liquid receiver and the reference potential

Methodology Applied

Scientific EffectElectric Field: Electric Field

Data Source

PatentUS12275030B2Substrate processing apparatus and method for determining deterioration degree of conductive pipe

Publication Date: 2025.04.15 TOKYO ELECTRON LTD

AI summary

A substrate processing apparatus includes: a substrate holder that holds and processes a substrate; a nozzle that ejects a processing liquid to the substrate held by the substrate holder; a conductive pipe connected to the nozzle and configured to supply the processing liquid to the nozzle; a processing liquid supply that supplies the processing liquid to the nozzle via the conductive pipe; a ground line that connects the conductive pipe and a reference potential; a liquid receiver provided around the substrate holder and configured to receive the processing liquid ejected from the nozzle; an electrode provided close to the liquid receiver; a voltage source configured to apply a voltage to the electrode and impart a potential difference between a liquid contact surface of the liquid receiver and the reference potential; and an ammeter configured to measure a current value of a current flowing through a charge moving path.