Conductive Plate Air Pocket Structure for Semiconductor Resin Voids

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Solution Overview

Problem

The formation of voids (bubbles) during the resin injection process in semiconductor modules can lead to insulation defects and reduced reliability due to peeling of the sealing resin, especially in modules with multiple power semiconductor chips.

Innovation Solution

A structure with an air pocket or groove is formed on the conductive plate where the sealing resin flows merge, trapping voids and preventing resin peeling, thereby ensuring reliable insulation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If sealing resin is injected to seal the semiconductor element and conductive plate, then the electrical insulation and protection are improved, but voids (bubbles) occur during the injection process causing insulation defects and resin peeling

Engineering Contradiction:
Improveelectrical insulation reliabilityVSAvoidvoids (bubbles) during resin injection
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The invention converts the harmful effect of air pockets by deliberately creating them in controlled locations. The air pocket structure is intentionally formed on the conductive plate surface at positions where resin flows merge, transforming the harmful void formation into a beneficial trap mechanism that prevents voids from reaching critical areas and causes resin peeling.

Inventive Principle:
Principle #22Blessing in disguise (Convert harm into benefit)

Solution Approach 2:

The air pocket structure acts as an intermediary element between the sealing resin and the conductive plate. It serves as a mediator that intercepts and traps voids formed during resin injection, preventing them from causing direct damage to the electrical insulation and preventing resin peeling by absorbing the harmful effect in a controlled manner.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Adaptability or versatility

If multiple power semiconductor chips are mounted to increase current capacity, then the functionality is improved, but the occurrence of voids increases due to complex resin flow patterns

Engineering Contradiction:
Improvecurrent capacityVSAvoidvoids (bubbles)
Core Design Contradiction:
Adaptability or versatilityVSObject-affected harmful factors

Solution Approach 1:

The invention applies local quality by creating air pockets specifically at strategic locations where resin flows from multiple injection points converge. Rather than uniformly treating the entire surface, the air pocket structures are localized at critical merge zones, providing targeted void trapping exactly where the complex flow patterns from multiple chips create the highest void risk.

Inventive Principle:
Principle #3Local quality

3Productivity

If low-viscosity sealing resin is used with higher injection rates to improve manufacturing efficiency, then the productivity is improved, but void formation increases

Engineering Contradiction:
Improvemanufacturing efficiencyVSAvoidvoids (bubbles)
Core Design Contradiction:
ProductivityVSObject-affected harmful factors

Solution Approach 1:

The air pocket structures are created in advance on the conductive plate surface before the resin injection process begins. This preliminary preparation ensures that when high-speed injection of low-viscosity resin occurs, the voids are immediately trapped by the pre-positioned air pockets, allowing high productivity without sacrificing quality.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The air pocket effectively traps voids, preventing resin peeling and maintaining the electrical reliability of the semiconductor module, even when using low-viscosity sealing resins and higher injection rates, thus enhancing manufacturing efficiency.

Implementation Method 1

a structure with an air pocket or groove is formed on the conductive plate where the sealing resin flows merge, trapping voids and preventing resin peeling

Methodology Applied
Scientific EffectAir pocket trapping: Bubble

Data Source

PatentUS10468328B2Semiconductor device and method of manufacturing a semiconductor device
Publication Date: 2019.11.05 FUJI ELECTRIC CO LTD
  • US10468328B2 patent drawing
  • US10468328B2 patent drawing
  • US10468328B2 patent drawing

AI summary

A semiconductor device includes a conductive plate having a front surface on which a semiconductor element is mounted and a sealing resin sealing therein at least the front surface of the conductive plate. The conductive plate includes a structure that traps bubbles in a region where flows of the injected sealing resin merge. The conductive plate has a rectangular shape. The sealing resin is injected from a single inlet on a first longitudinal side of the conductive plate. The region where the flows of the sealing resin merge is a region of a corner of a second longitudinal side that across the semiconductor element, opposes the first longitudinal side from which the sealing resin is injected.