Conductive Polymer Coating Composition for Conductivity and Coatability
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Solution Overview
Problem
Existing conductive compositions used in charged particle beam lithography face challenges in achieving high conductivity while maintaining excellent coatability, often due to the adverse effects of additives like surfactants on resist characteristics, and there is a need for improved conductivity in coating films.
Innovation Solution
A conductive composition comprising a conductive polymer, a water-soluble polymer, and a solvent, with specific water-soluble polymers and controlled amounts, along with optional basic compounds, to enhance conductivity and coatability, using polymers like polyaniline sulfonic acid and water-soluble vinyl monomers with controlled chain transfer agents.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If a surfactant is added to improve the coatability of the conductive composition, then the coatability is improved, but the resist characteristics are adversely affected and a predetermined pattern cannot be obtained
Solution Approach 1:
The patent removes harmful surfactants from the conductive composition formulation. By extracting this problematic component, the invention achieves coatability improvement through alternative means (the conductive polymer and water-soluble polymer combination) while eliminating the adverse effects on resist characteristics that surfactants cause.
Solution Approach 2:
The invention uses a composite system consisting of conductive polymer and water-soluble polymer in specific proportions. This composite material approach provides coatability enhancement without requiring surfactants, thereby maintaining resist characteristics. The synergistic interaction between the two polymers achieves the desired coating performance.
2Reliability
If the conductivity of the coating film is increased, then the antistatic function is improved, but the coatability may be compromised
Solution Approach 1:
The patent optimizes the concentration ratio of conductive polymer to water-soluble polymer, controlling it within a specific range. By adjusting this critical parameter, the invention achieves a balance where sufficient conductivity is obtained while maintaining excellent coatability. The specific proportion control ensures both functional and operational requirements are met.
Data Source
AI summary
A water-soluble polymer may include a first water-soluble polymer of formula (3):wherein R8 is a linear or branched alkyl group with 6 to 20 carbon atoms, R9 is a hydrophilic group, R10 is a hydrogen atom or a methyl group, Y2 is a single bond, —S—, —S(═O)—, —C(═O)—O—, or —O—, and p2 is an average number of repetitions and is a number in a range of from 1 to 50.