Conductive Dispensing Pump and Nozzle for Static Charge Dissipation
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Solution Overview
Problem
The buildup of electrostatic charge in developer dispensing pumps and nozzles during IC manufacturing leads to electrical discharges, causing particle detachment and defects in the resist pattern on the substrate.
Innovation Solution
Incorporating electrically conductive materials and grounding connections in the dispensing system to dissipate static charges, reducing the likelihood of electrical discharges and particle formation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If high electrical resistivity negative tone developer is used, then developer performance is improved, but static charge buildup and electrical discharge increase
Solution Approach 1:
An electrically conductive coating is applied to the inner surface of the dispensing pump and nozzle, serving as an intermediary layer that prevents direct contact between the high resistivity developer and the dispensing system walls, thereby eliminating charge buildup while maintaining developer performance
Solution Approach 2:
The electrical conductivity parameter of the dispensing system surface is changed by applying a conductive coating, transforming the surface from electrically insulating to electrically conductive, which allows charge dissipation without altering the developer's bulk properties
2Object-affected harmful factors
If electrically conductive materials are used for pump and nozzle, then static charge dissipation is improved, but particle detachment and defects increase
Solution Approach 1:
Electrically conductive properties are applied locally only to the inner surface where the developer contacts the dispensing system, while the bulk materials maintain their original properties, ensuring charge dissipation at the interface without causing widespread particle detachment
Solution Approach 2:
A composite structure is created by combining the base dispensing system material with an electrically conductive coating layer, achieving both mechanical integrity and electrical conductivity functions simultaneously
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Prevents damage to the dispensing system components and minimizes particle deposition on the substrate, ensuring higher quality resist patterns and reducing defects in subsequent processing steps.
Implementation Method 1
The body (425) includes an electrically conductive material... one or more first electrical contacts (402) disposed on the body (425)... one or more first connection wires (422) coupled between the one or more first electrical contacts (402) and ground
Implementation Method 2
the negative tone developer collects electrostatic charge inside the developer dispensing pump and the dispensing nozzle that, due to high electrical resistivity, may build up a high voltage
Data Source
AI summary
A dispensing system includes a dispense material supply that contains a dispense material and a dispensing pump connected downstream from the dispense material supply. The dispensing pump includes a body made of a first electrically conductive material, one or more first electrical contacts that are disposed on the body of the dispensing pump, and one or more first connection wires that are coupled between each one of the one or more first electrical contacts and ground. The dispensing system also includes a dispensing nozzle connected downstream from the dispensing pump and includes a tube made of a second electrically conductive material, one or more second electrical contacts that are disposed on an outer surface of the tube, and one or more second connection wires that are coupled between each one of the one or more second electrical contacts and the ground.