Conductive Reticle Container with Locator System
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Solution Overview
Problem
Conventional reticle pods used in semiconductor processes are prone to contamination and electrostatic discharge due to the use of nonconductive materials and screw-based assembly, which generates particles and accumulates electric charge, potentially damaging the reticles.
Innovation Solution
A container design featuring a canopy positioned without screws, utilizing electrically conductive materials and a locator system to maintain the canopy in a fixed position, preventing particle generation and electrostatic charge accumulation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If nonconductive macromolecular material is used for the canopy, then the material is transparent, easy to mold, and low cost, but electric charge accumulates on the reticle causing electrostatic discharge
Solution Approach 1:
The canopy is made of composite material comprising macromolecular material and conductive material. The macromolecular material provides transparency, moldability, and cost-effectiveness, while the conductive material (such as ITO, ZnO, or metal particles) provides electrostatic discharge protection by dissipating accumulated charge. This composite structure resolves the contradiction between ease of manufacture and reliability.
2Strength
If screws are used to position the canopy and chassis, then the assembly is secure, but particles are generated during the screwing process causing contamination
Solution Approach 1:
The invention removes screws from the assembly process. The canopy and chassis are positioned and fixed without screws, eliminating the source of particle contamination during assembly. Alternative positioning methods such as precision-machined surfaces, adhesives, or snap-fit mechanisms are used to maintain assembly security without the harmful friction and particle generation associated with screwing.
3Ease of operation
If humidity is kept low in the clean room, then the working environment is controlled, but electric charge is easily generated and accumulated on the reticle
Solution Approach 1:
The conductive material integrated into the canopy provides preliminary protection against electrostatic charge accumulation. By incorporating the charge-dissipating function into the container structure itself, the system proactively counteracts the electrostatic problems exacerbated by low humidity conditions, eliminating the need to compromise clean room humidity control.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively reduces contamination and protects reticles from static electricity damage while maintaining the original structure of reticle pods, ensuring a clean and conductive environment for semiconductor processing.
Implementation Method 1
the canopy and the chassis are made of an electrically conductive material so as to dissipate electric charge on a reticle
Implementation Method 2
A plurality of locators pressed against the wall and is mounted around the periphery of the canopy to orient the canopy in a fixed position
Data Source
AI summary
A container having a top cover and a bottom cover is provided, which includes a canopy disposed on the bottom cover to form therewith a space to accommodate an article. A plurality of locators is disposed on a surface of the bottom cover so that when the bottom cover is tightly combined with the top cover, the locators are clipped between the bottom cover and the top cover to orient the canopy in a fixed position.