Conductive Strip Mask for Semiconductor Metallization

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Solution Overview

Problem

Current semiconductor device manufacturing processes are inefficient, particularly in the production of photovoltaic cells, where increasing efficiency while maintaining cost-effectiveness remains a challenge.

Innovation Solution

A novel method for manufacturing semiconductor devices involves forming metal regions over semiconductor substrates, using conductive strips to create conductive contacts through a bonding and etching process, which enhances the electrical connections and reduces reflection by texturing the surface, thereby improving light collection and energy conversion efficiency.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If conventional manufacturing processes are used for semiconductor devices, then the production process is simpler, but the manufacturing efficiency is low

Engineering Contradiction:
Improvemanufacturing efficiencyVSAvoidprocess complexity
Core Design Contradiction:
ProductivityVSDevice complexity

Solution Approach 1:

The manufacturing process is segmented into distinct stages: forming metal regions, depositing conductive material, applying mask, etching, and removing mask. This segmentation allows each step to be optimized independently, improving overall manufacturing efficiency while maintaining process clarity and control.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Metal regions are formed on the semiconductor substrate before the actual conductive contact fabrication. This preliminary action prepares the substrate in advance, enabling subsequent steps to proceed more efficiently and reducing overall manufacturing time.

Inventive Principle:
Principle #10Preliminary action

2Reliability

If metal regions are formed over semiconductor substrates with conductive contacts, then electrical conduction is enhanced, but the manufacturing process becomes more complex

Engineering Contradiction:
Improveelectrical conductionVSAvoidmanufacturing process complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

A conductive material layer is deposited as an intermediary between the metal regions and the semiconductor substrate. This intermediary layer facilitates reliable electrical conduction while providing a controlled interface that simplifies the overall manufacturing process compared to direct metal-to-substrate contact.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

Conductive material is selectively deposited only in specific regions where conductive contacts are needed, rather than uniformly across the entire substrate. This local quality approach enhances electrical conduction where required while reducing material usage and process complexity.

Inventive Principle:
Principle #3Local quality

3Reliability

If conductive strips are used to form conductive contacts through bonding and etching, then electrical connections are improved, but the manufacturing time increases

Engineering Contradiction:
Improveelectrical connectionsVSAvoidmanufacturing time
Core Design Contradiction:
ReliabilityVSLoss of time

Solution Approach 1:

The bonding and etching operations are merged into an integrated process sequence where conductive strips are bonded to metal regions and then etched together as a unit. This combination reduces the number of separate manufacturing steps, improving electrical connections while minimizing additional manufacturing time.

Inventive Principle:
Principle #5Merging (Combining)

4Use of energy by moving object

If surface texturing is applied to reduce reflection, then light absorption is enhanced, but the manufacturing process becomes more complex

Engineering Contradiction:
Improvelight absorptionVSAvoidsurface processing complexity
Core Design Contradiction:
Use of energy by moving objectVSDevice complexity

Solution Approach 1:

The surface of the semiconductor substrate is textured with curved or rounded features rather than flat surfaces. This curvature reduces reflection by scattering incident light at multiple angles, enhancing light absorption while achieving the effect through a relatively simple surface modification process.

Inventive Principle:
Principle #14Spheroidality (Curvature)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This method increases the efficiency and cost-effectiveness of semiconductor device production by enhancing light absorption and electrical current conduction, leading to improved performance in semiconductor devices such as solar cells.

Implementation Method 1

a bonding process is performed to bond a contacting portion of the conductive strip to the first portion of the metal region

Methodology Applied
Scientific EffectBonding: Welding

Implementation Method 2

an etching process is performed to form conductive contacts using the conductive strip as a mask

Methodology Applied
Scientific EffectEtching: Ablation

Implementation Method 3

texturing the surface, thereby improving light collection

Methodology Applied
Scientific EffectLight scattering: Scattering

Data Source

PatentUS11444214B2Conductive strip based mask for metallization of semiconductor devices
Publication Date: 2022.09.13 TOTAL MARKETING SERVICES SA
  • US11444214B2 patent drawing
  • US11444214B2 patent drawing
  • US11444214B2 patent drawing

AI summary

Methods of manufacturing a semiconductor device, and resulting semiconductor device are described. In an example, the method for manufacturing a semiconductor device include forming a semiconductor region and forming a metal seed region over the semiconductor region. The method can include placing a conductive strip over a first portion of the metal region, where the conductive strip is formed over the semiconductor region. The method can include bonding a contacting portion of the conductive strip to the first portion the metal region. The method can include etching a second portion of the metal region and where the conductive strip inhibits etching of the first portion of the metal region. In an example, the conductive strip can have a coating. In one example, the semiconductor device can be a solar cell.