Conductive Substrate Shielding for Process Condition Measuring Devices
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Solution Overview
Problem
Process condition measuring devices (PCMDs) face challenges in accurately measuring processing conditions in harsh environments with high-energy electromagnetic radiation, where RF radiation can cause noise and damage to electronic components, and there is a need for effective shielding to prevent contamination during etching processes.
Innovation Solution
A PCMD design where electronic components are sandwiched between two conductive substrate portions forming a Faraday cage, made of highly doped Silicon with similar dimensions to production substrates, providing shielding from electromagnetic radiation and allowing for accurate temperature and process condition measurements without contamination.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If electronic components are placed in a PCMD to enable real-time monitoring, then measurement capability is improved, but susceptibility to electromagnetic radiation and noise increases
Solution Approach 1:
A conductive substrate portion is introduced as an intermediary between the electronic components and the external electromagnetic environment. This substrate acts as a Faraday cage that blocks harmful RF radiation while allowing the electronic components to function normally for real-time monitoring of processing conditions.
2Reliability
If PCMD is made conductive to provide shielding, then protection from electromagnetic radiation is improved, but etching of material from PCMD may occur causing contamination
Solution Approach 1:
The substrate material parameters are changed by applying a conductive coating (such as doped silicon or metal layers) that provides electromagnetic shielding while being resistant to etching processes. The coating material is selected to have high electrical conductivity for shielding while maintaining chemical stability in the processing environment.
3Measurement precision
If sensors are placed close to workpiece to measure processing conditions, then measurement accuracy is improved, but sensor readings are disturbed by electromagnetic radiation
Solution Approach 1:
The conductive substrate serves as a protective intermediary that surrounds and shields the sensors and electronic components. This allows the sensors to be positioned close to the workpiece for accurate measurements while the substrate blocks electromagnetic noise from disturbing the sensor readings.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively shields electronic components from electromagnetic interference, ensuring accurate measurements and preventing contamination, while maintaining thermal and electrical conductivity similar to production substrates, thus enhancing the reliability of process condition monitoring in challenging environments.
Implementation Method 1
Electronic components of a process condition measuring device (PCMD) are sandwiched between two conductive substrate portions that are electrically connected together. The substrate portions thus form a Faraday cage around the electronic components that shields the electronic components from electromagnetic radiation.
Data Source
AI summary
A process condition measuring device has electronic components sandwiched between two conductive substrate portions. The conductive substrate portions are joined by an electrically conductive pathway. Native oxide is removed from substrate portions and electrically conductive contact pads are formed that are then joined together with electrically conductive adhesive to form the electrically conductive pathway.