Conductive Fluoropolymer Diaphragm Valve for ESD Dissipation

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Solution Overview

Problem

Fluid handling systems in ultra-pure applications face challenges with electrostatic discharge (ESD) due to frictional contact between fluids and components, leading to static charge buildup, which can damage sensitive substrates and components, and conventional grounding methods result in mechanical clutter and potential contamination.

Innovation Solution

The use of conductive fluoropolymer components, such as diaphragm valves with flexible fluoropolymer bodies loaded with conductive materials or perfluorinated ionomers, to transfer static charge to ground, reducing ESD through electrostatic dissipative properties while maintaining corrosion resistance and purity standards.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional metal or conductive components are used for ESD mitigation, then static charge is dispersed to ground, but mechanical clutter and system complexity increase

Engineering Contradiction:
ImproveESD mitigationVSAvoidgrounding system complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent combines the valve body material with electrostatic dissipative properties by using conductive fluoropolymer, merging the fluid control function and ESD mitigation function into a single integrated component, thereby eliminating the need for separate grounding straps and reducing system complexity

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The valve body is designed to serve multiple functions: fluid control through the diaphragm mechanism and simultaneous electrostatic charge dissipation through the conductive fluoropolymer material, making the component universal and reducing the number of separate components needed

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Reliability

If multiple grounding straps are used to mitigate static charge, then ESD is reduced, but mechanical clutter and maintenance requirements increase

Engineering Contradiction:
ImproveESD mitigationVSAvoidmaintenance ease
Core Design Contradiction:
ReliabilityVSEase of operation

Solution Approach 1:

The electrostatic dissipative properties are integrated into the valve body material itself, combining the grounding function with the valve structure, which eliminates the need for multiple separate grounding straps and reduces maintenance requirements

Inventive Principle:
Principle #5Merging (Combining)

3Reliability

If conventional polymers are used, then corrosion resistance is provided, but electrostatic charge buildup occurs

Engineering Contradiction:
Improvecorrosion resistanceVSAvoidstatic charge buildup
Core Design Contradiction:
ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The patent uses conductive fluoropolymer, a composite material that combines the corrosion-resistant properties of conventional polymers with electrostatic dissipative capabilities, thereby simultaneously addressing both corrosion resistance and static charge mitigation requirements

Inventive Principle:
Principle #40Composite materials

Solution Approach 2:

The electrical conductivity parameter of the polymer material is changed by using conductive fluoropolymer instead of conventional non-conductive polymers, allowing the material to dissipate static charge while maintaining its corrosion-resistant properties

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Effectively mitigates electrostatic discharge in ultra-pure fluid handling systems, reducing the risk of damage to substrates and components, and simplifies grounding without mechanical clutter or contamination, enhancing system performance and safety.

Implementation Method 1

the fluid control component comprises a conductive fluoropolymer to transfer static charge from the fluid control component to ground

Methodology Applied
Scientific EffectElectrostatic conduction: Conduction (electrical)

Implementation Method 2

Frictional contact between fluids and surfaces of various operational components (e.g. tubing or piping, valves, fittings, filters, etc.) in the fluid system can result in generation and buildup of static electrical charges

Methodology Applied
Scientific EffectTriboelectric effect: Triboelectric Effect

Data Source

PatentUS12066121B2Electrostatic discharge mitigation valve
Publication Date: 2024.08.20 ENTEGRIS INC
  • US12066121B2 patent drawing
  • US12066121B2 patent drawing
  • US12066121B2 patent drawing

AI summary

This disclosure provides operative components that mitigate electrostatic charge in fluid circuits. Illustrative embodiments include diaphragm valves that provide fluid control and allow static charge to dissipate when these diaphragm valves are grounded.