Fluid Flow Conduit Deposit Detection Using Thermal Response
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Solution Overview
Problem
Existing methods for monitoring material build-up in fluid flow conduits, such as semiconductor processing systems, face challenges due to the geometry of the conduits and potential contamination issues, which hinder accurate detection of build-up severity and location.
Innovation Solution
A method involving a controller that provides an excitation signal to a heating element within the fluid flow conduit, obtaining thermodynamic data such as heat flux, diffusivity, and temperature differential data, and determining the amount of material deposits based on this data.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If scopes or cameras are inserted within the fluid flow conduit to monitor material build-up, then detection capability is improved, but contamination risk increases and measurement accuracy deteriorates due to conduit geometry constraints
Solution Approach 1:
The patent introduces thermal energy as an intermediary to indirectly probe the conduit interior. Instead of inserting physical sensors that risk contamination, the system applies heat to the conduit exterior and measures temperature responses, allowing detection of material build-up without direct contact with the fluid stream.
Solution Approach 2:
The patent replaces mechanical/optical inspection methods (scopes and cameras) with a thermal field-based detection system. By substituting physical probe insertion with thermal energy application and measurement, the system eliminates contamination risks while maintaining detection capability.
2Measurement precision
If scopes or cameras are inserted within the fluid flow conduit to monitor material build-up, then detection capability is improved, but the complexity of the system increases
Solution Approach 1:
The patent uses thermal energy as a non-intrusive intermediary that can be applied and measured through the conduit wall, eliminating the need for complex internal sensor installations, mounting mechanisms, and protective housings required by scopes and cameras.
Solution Approach 2:
The patent replaces complex mechanical inspection systems with a simpler thermal field approach, reducing the number of moving parts, installation requirements, and maintenance needs while achieving comparable or superior detection accuracy.
3Reliability
If material build-up is monitored using traditional methods, then detection is possible, but the severity and location of build-up cannot be accurately determined due to conduit and material geometry
Solution Approach 1:
The patent divides the conduit into multiple discrete measurement zones along its length, with heating and sensing elements positioned at different locations. This segmentation allows the system to identify not only the presence but also the specific location and severity of material build-up at each zone by comparing temperature responses across multiple points.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach allows for accurate monitoring of material build-up in fluid flow conduits, enabling early detection of potential clogs and system issues, while minimizing contamination risks.
Implementation Method 1
providing, by a controller, an excitation signal to a heating element of the fluid flow conduit
Implementation Method 2
the thermodynamic data includes the diffusivity data, and the diffusivity data indicates a measured thermal diffusivity
Data Source
AI summary
A method of detecting accumulation of material deposits within a fluid flow conduit includes providing, by a controller, an excitation signal to a heating element of the fluid flow conduit. The method includes obtaining, by the controller, thermodynamic data of the fluid flow conduit in response to providing the excitation signal, where the thermodynamic data includes heat flux data, diffusivity data, time data, temperature differential data, or a combination thereof. The method includes determining, by the controller, an amount of material deposits based on the thermodynamic data.