Conduit with Heat Transfer Fluid for Chemical Temperature Control
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Solution Overview
Problem
Substrate processing chambers in semiconductor manufacturing face challenges with temperature variations in conduits transporting chemicals, leading to condensation or decomposition, which affects the stability and precision of chemical delivery.
Innovation Solution
A conduit system with an inner channel for chemical delivery and an outer channel for a heat transfer fluid, where the heat transfer fluid maintains the chemical at a consistent temperature, minimizing variations along the conduit length.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If external electrical heater jackets are used to heat the conduits, then condensation is prevented, but temperature variations along the conduit length increase
Solution Approach 1:
The patent introduces a heat transfer fluid as an intermediary substance that circulates through the conduit to transfer thermal energy uniformly along the chemical transport path. This fluid mediator distributes heat more evenly compared to external heater jackets, preventing both condensation and excessive temperature variations by providing continuous thermal regulation throughout the conduit length.
Solution Approach 2:
The patent employs a fluid-based heating system where a heat transfer fluid circulates through the conduit in controlled flow. This hydraulic approach allows for uniform heat distribution along the conduit by leveraging fluid circulation and heat exchange principles, eliminating the temperature gradients caused by external electrical heating while preventing condensation.
2Adaptability or versatility
If the conduit length is increased to transport chemicals over longer distances, then substrate processing can be performed in separate locations, but temperature control becomes more difficult
Solution Approach 1:
The heat transfer fluid acts as a mobile thermal mediator that can maintain temperature control over extended conduit lengths. By circulating this fluid throughout the entire conduit system, the patent enables long-distance chemical transport while maintaining uniform temperature distribution, allowing substrate processing chambers to be located separately from chemical storage areas without compromising temperature control.
3Use of energy by moving object
If the chemical temperature is allowed to vary widely, then energy consumption is reduced, but chemical decomposition or corrosion occurs
Solution Approach 1:
The patent implements continuous circulation of the heat transfer fluid through the conduit system, providing ongoing thermal regulation. This continuous action maintains chemical temperature within safe limits throughout transport, preventing decomposition and corrosion while optimizing energy usage by maintaining only the necessary temperature range rather than allowing extreme variations.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution ensures that chemicals are delivered to substrate processing chambers within a narrow temperature range, preventing condensation and maintaining chemical stability, thereby enhancing the precision and reliability of semiconductor processing operations.
Implementation Method 1
a heat exchange fluid surrounding the inner channel
Implementation Method 2
flowing from a vessel containing the chemical through an inner channel of a length of a conduit; and maintaining the chemical flowing in the inner channel at a temperature variation of less than 10° C. along the length of the conduit
Data Source
AI summary
Chemical deliver conduits, systems for substrate processing and methods for supplying a chemical to a substrate processing chamber are described. The conduit has a length and connects a vessel containing the chemical to the substrate processing chamber. The conduit comprises an outer channel surrounding an inner channel. The outer channel is in fluid communication with source of a heat transfer fluid, and the inner channel is in fluid communication with the vessel containing the chemical.