Cone-Shaped Meta-Atoms Sputtering for Optical Elements
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Solution Overview
Problem
Advanced optical elements face challenges in manufacturing high aspect-ratio structures, particularly with stamps that exhibit reduced lifetime and fatigue, and there is a need for reliable methods to deposit high-index materials for applications involving long wavelengths.
Innovation Solution
The use of sputtering to deposit meta-materials into cone-shaped or truncated cone-shaped meta-atoms embedded in a polymer layer, formed by imprinting a replication material with a stamp and subsequent polishing to create reliable optical metastructures that can change the local amplitude or phase of light waves.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If stamps are used to imprint high aspect-ratio structures, then the optical metastructures can be formed, but the stamps exhibit reduced lifetime and fatigue
Solution Approach 1:
The patent uses a stamp to create an imprint in a replication material, which is then used to form the metastructures. The stamp creates a negative impression that is transferred to the final structure, allowing the stamp itself to have simpler, more durable features while still achieving high aspect-ratio metastructures in the replicated material
Solution Approach 2:
The replication material serves as an intermediary between the stamp and the final metastructure. The stamp imprints the replication material, which is then processed (etched, deposited) to form the metastructures, protecting the stamp from direct wear while achieving the desired high aspect-ratio features
2Reliability
If conventional deposition methods are used for meta-materials, then the manufacturing process can be completed, but reliable deposition of high-index materials for long wavelength applications is difficult
Solution Approach 1:
The patent employs sputtering deposition, which changes the physical and chemical parameters of the deposition process (vacuum environment, plasma activation, ion bombardment) to enable reliable formation of high-index materials like silicon that are difficult to deposit using conventional methods, achieving the required optical properties for long wavelength applications
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method provides a reliable and efficient way to manufacture optical elements with cone-shaped meta-atoms, facilitating the deposition of high-index materials and improving the optical functionality of the metastructures, such as in optoelectronic modules.
Implementation Method 1
The techniques can include the use of sputtering to deposit the material for the meta-atoms
Data Source
AI summary
Optical element including an optical metastructure composed, at least in part, of cone-shaped or truncated-shaped meta-atoms, such as pyramid-shaped or frustum-shaped meta-atoms, method of manufacturing the optical element, and optical device comprising the optical element. The manufacturing may include the use of sputtering to deposit the material for the meta-atoms, which may be embedded, for example, in a polymer layer. The optical element might be composed of a stack of two metastructured layers.