Confocal Microscope Scanning Along Sample Rough Shape
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Solution Overview
Problem
Conventional confocal microscopes face challenges in capturing high-precision 3D images of large areas quickly, especially when using high-magnification objective lenses, due to narrow field of view and the need for compensating shading and distortion in the optical system.
Innovation Solution
A confocal microscope system that includes a first objective lens with an inclined optical axis, a scanning mechanism to move the lens relative to the sample along the rough shape of the sample, and a second objective lens for acquiring rough-shape data, allowing for continuous scanning and high-precision image generation with reduced image-taking time.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If an objective lens with high magnification is used, then the resolution of the confocal image is improved, but the field of view becomes narrow and the image-taking time increases
Solution Approach 1:
The patent divides the imaging process into two stages: first acquiring rough-shape data with a low-magnification objective lens to obtain overview information, then using a high-magnification objective lens to capture detailed confocal images only of the regions of interest. This segmentation allows the system to benefit from both wide field of view and high resolution without the time penalty of scanning the entire large area at high magnification.
Solution Approach 2:
The patent performs preliminary acquisition of rough-shape data before the actual confocal imaging. This preliminary action provides advance information about the sample's topography and features, enabling the system to plan the subsequent high-magnification scanning path efficiently and avoid unnecessary scanning of areas that do not require detailed examination.
2Measurement precision
If an objective lens with high magnification is used, then the resolution of the confocal image is improved, but the field of view becomes narrow
Solution Approach 1:
The patent segments the imaging task into an overview acquisition phase using low magnification and a detailed imaging phase using high magnification. This allows the system to capture both large-area context and fine-detail features by appropriately matching magnification level to the specific imaging requirement for each region.
Solution Approach 2:
The patent adds the dimension of rough-shape data acquisition to the traditional confocal imaging process. By incorporating this additional dimensional information about sample topography and overall structure, the system can intelligently navigate between different magnification levels and field of view requirements.
3Measurement precision
If the stage is moved in a stepwise manner for 3D scanning, then the 3D shape measurement is achieved, but the image-taking time increases
Solution Approach 1:
The patent performs preliminary acquisition of rough-shape data that captures the 3D topography information before detailed confocal imaging. This preliminary 3D scanning provides the necessary depth and shape information, allowing the subsequent high-magnification imaging to focus only on capturing surface details rather than repeatedly scanning the entire 3D space.
Solution Approach 2:
The patent segments the 3D scanning process into a coarse rough-shape acquisition stage and a fine detail imaging stage. This segmentation allows the system to obtain 3D shape information efficiently at low magnification, then use that information to guide high-magnification imaging only where needed, reducing total imaging time while maintaining 3D measurement accuracy.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables the capture of high-precision confocal images in a short time by scanning the sample along its rough shape, improving image-taking efficiency and accuracy, particularly for semiconductor wafers with notches, while minimizing distortion and shading issues.
Implementation Method 1
a first objective lens configured to concentrate the illumination light on the sample
Implementation Method 2
an optical scanner configured to scan an illuminated place on the sample in a field of view of the first objective lens
Implementation Method 3
an optical detector configured to detect reflected light through a confocal optical system, the reflected light being light that has been reflected on the sample and has passed through the first objective lens
Data Source
AI summary
A confocal microscope includes a data acquisition unit configured to acquire a rough-shape data indicating a rough shape of a sample, an illumination light source configured to generate illumination light for illuminating the sample, an objective lens configured to concentrate the illumination light on the sample, an optical scanner configured to scan an illuminated place on the sample in a field of view of the objective lens, a stage configured to scan the illuminated place along the rough shape of the sample by changing a position of the objective lens relative to the sample, and an optical detector configured to detect reflected light through a confocal optical system, the reflected light being light that has been reflected on the sample and has passed through the objective lens.