Confocal Microscope Z-Scan Grouping for Surface Measurement
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Solution Overview
Problem
Conventional laser scanning confocal microscopes face challenges in setting an appropriate Z-scanning range for accurate surface shape measurement, as a range that is too wide is time-consuming, while a range that is too narrow may miss surface portions, making it difficult to measure the entire specimen surface, especially for beginners unfamiliar with the measurement principles.
Innovation Solution
The confocal microscope apparatus divides the preliminary scanning area into groups based on height information and adjusts scanning conditions for each group, allowing for efficient and accurate surface shape measurement by optimizing the Z-scanning speed and brightness settings for principal scanning.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a wide Z-scanning range is set to ensure the entire specimen surface is captured, then measurement completeness is improved, but scanning time increases significantly
Solution Approach 1:
The patent divides the Z-scanning range into multiple groups based on height information obtained from preliminary scanning. Each group corresponds to a specific height range, and the system performs principal scanning only on relevant groups, segmenting the measurement process to avoid scanning the entire wide range, thus reducing scanning time while maintaining measurement completeness.
Solution Approach 2:
The patent performs preliminary scanning before principal scanning to obtain height information about the specimen surface. This preliminary action allows the system to determine the appropriate Z-scanning range and group assignments in advance, enabling optimized principal scanning that captures the entire surface without unnecessary scanning time.
2Productivity
If a narrow Z-scanning range is set to reduce scanning time, then productivity is improved, but measurement precision deteriorates as surface portions may be missed
Solution Approach 1:
The patent dynamically adjusts the Z-scanning range for each group based on the height information from preliminary scanning. Instead of using a fixed narrow range, the system determines the appropriate range for each group, ensuring that the scanning covers all relevant surface portions while maintaining efficiency. This dynamic adjustment preserves measurement precision without sacrificing productivity.
3Measurement precision
If complex setting configurations are required to optimize scanning parameters, then measurement precision is improved, but ease of operation deteriorates
Solution Approach 1:
The patent implements automatic determination of scanning areas and slice intervals based on height information from preliminary scanning. The system self-configures the optimal Z-scanning range and group assignments without requiring manual user input, eliminating complex configuration steps while maintaining measurement precision. Users simply need to initiate the measurement process, and the system handles the optimization automatically.
Data Source
AI summary
A scanning confocal microscope apparatus includes: a scanning confocal microscope that includes an objective lens; a computing device that divides a range in a direction of an optical axis of the objective lens of a preliminary scanning area on which preliminary scanning has been performed into a plurality of groups, in accordance with data obtained by performing the preliminary scanning using the scanning confocal microscope; and a controller that controls the scanning confocal microscope so as to perform principal scanning in which at least a portion of the preliminary scanning area is scanned under a measurement condition determined for each of the plurality of groups.


