Conformal Coating on 3D Substrates via Aqueous Sol-Gel

Resolve Bottlenecks,
Find Innovative Solutions
Generate Solutions

Solution Overview

Problem

Current methods for conformal coating of three-dimensional substrates with high aspect-ratio elements, such as thin film Li-ion batteries, are inefficient due to high costs, complex setups, and low throughput, particularly for wet chemical routes that are not suitable for substrates with relief features.

Innovation Solution

A method involving the use of an aqueous sol-gel precursor solution applied at a temperature range of 140-275°C, followed by annealing, to achieve a conformal coating with uniform thickness, suitable for substrates with high aspect ratios, using techniques like spraying to ensure complete coverage and rapid processing.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If vacuum based techniques like CVD and ALD are used for conformal coating, then coating uniformity and quality are improved, but equipment cost, running cost, and complexity increase significantly

Engineering Contradiction:
Improvecoating uniformityVSAvoidequipment complexity
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The patent replaces vacuum-based physical deposition systems (CVD/ALD equipment) with a wet chemical spray coating system. The aqueous precursor solution is delivered via spray nozzle, and the coating process occurs in atmospheric conditions through chemical reactions on the substrate surface, eliminating the need for complex vacuum chambers and specialized deposition equipment.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The patent employs a spray coating mechanism that uses pneumatic or hydraulic delivery of the aqueous precursor solution through a spray nozzle. The liquid precursor is atomized and deposited onto the substrate surface, utilizing fluid dynamics principles to achieve uniform coating without requiring vacuum-based physical vapor deposition equipment.

Inventive Principle:
Principle #29Pneumatics and hydraulics

2Manufacturing precision

If vacuum based techniques like CVD and ALD are used for conformal coating, then coating uniformity is improved, but throughput decreases due to increased deposition time

Engineering Contradiction:
Improvecoating uniformityVSAvoidthroughput
Core Design Contradiction:
Manufacturing precisionVSProductivity

Solution Approach 1:

The patent replaces slow vacuum-based deposition processes with rapid wet chemical spray coating. The aqueous precursor solution reacts chemically on the substrate surface at atmospheric pressure, achieving conformal coating in significantly reduced time compared to sequential vacuum deposition cycles, thereby increasing manufacturing throughput.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

3Ease of manufacture

If wet chemical routes are used for coating, then operational simplicity and cost are improved, but suitability for substrates with relief features deteriorates

Engineering Contradiction:
Improveoperational simplicityVSAvoidcoating conformality
Core Design Contradiction:
Ease of manufactureVSManufacturing precision

Solution Approach 1:

The patent applies a heating treatment to the substrate before spray coating to modify its surface properties. This preliminary thermal treatment enhances the substrate's interaction with the aqueous precursor solution, promoting uniform wetting and chemical reaction across complex three-dimensional surfaces with high aspect ratio features, thereby achieving conformal coating that would otherwise be difficult with simple dip or spray methods.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent changes the temperature parameter of the substrate to optimize the coating process. By controlling substrate temperature during spray coating, the patent adjusts the kinetics of precursor decomposition and coating formation, enabling uniform deposition on complex geometries while maintaining the simplicity of wet chemical routes.

Inventive Principle:
Principle #35Parameter changes

4Manufacturing precision

If multiple spray-coating and annealing steps are used to achieve desired thickness, then coating completeness is improved, but process time increases significantly

Engineering Contradiction:
Improvecoating thickness uniformityVSAvoidprocess time
Core Design Contradiction:
Manufacturing precisionVSLoss of time

Solution Approach 1:

The patent applies a heating treatment to the substrate before spray coating to modify its surface properties. This preliminary thermal treatment enhances the substrate's interaction with the aqueous precursor solution, promoting uniform wetting and chemical reaction across complex three-dimensional surfaces with high aspect ratio features, thereby achieving conformal coating that would otherwise be difficult with simple dip or spray methods.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The patent changes the temperature parameter of the substrate to optimize the coating process. By controlling substrate temperature during spray coating, the patent adjusts the kinetics of precursor decomposition and coating formation, enabling uniform deposition on complex geometries while maintaining the simplicity of wet chemical routes.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The method enables rapid, cost-effective, and environmentally friendly conformal coating with uniformity of less than 15% standard deviation, suitable for a variety of substrates, including conductive and semi-conductive materials, and allows for the deposition of metal oxide layers for batteries, capacitors, and sensors, improving performance and stability.

Implementation Method 1

coating an aqueous solution comprising a sol-gel (or solution-gel) precursor on said substrate

Methodology Applied
Scientific EffectSol-gel decomposition: Decomposition (biological)

Implementation Method 2

Setting the temperature of the substrate within the range 140-275° C.

Methodology Applied
Scientific EffectEvaporation: Evaporation

Data Source

PatentUS10644302B2Conformal coating on three-dimensional substrates
Publication Date: 2020.05.05 INTERUNIVERSITAIR MICRO ELECTRONICS CENT (IMEC VZW)
  • US10644302B2 patent drawing
  • US10644302B2 patent drawing
  • US10644302B2 patent drawing

AI summary

The disclosure relates to a method for forming a conformal coating on a substrate having a topography presenting a relief. One method of the disclosure includes setting the temperature of the substrate within the range 140-275° C., and coating an aqueous solution including a sol-gel precursor on said substrate. The disclosure also relates to a method for fabricating a battery, a capacitor, a catalyst, a photovoltaic cell or a sensor using such a method, and to an aqueous solution for use in such a method.