Conformal Dissipative Coatings for Static Control in Process Chambers
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Solution Overview
Problem
Rapid movement of robots during substrate transportation in electronic device manufacturing generates charged particles that contribute to substrate defects, which are not effectively addressed by existing coatings.
Innovation Solution
Applying a uniform, conformal, and porosity-free electrically-dissipative coating with a thickness of 10 nm to 900 nm and resistance of 1×10^5 to 1×10^11 ohm/sq using ALD, CVD, PEALD, MOCVD, or MBE processes to provide a dissipative path from the coating to ground, reducing charge accumulation and particle adherence.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If existing coatings are applied to robot end effectors, then substrate transportation is enabled, but charged particles accumulate causing substrate defects
Solution Approach 1:
The patent changes the electrical parameter of the coating by applying a multi-layer structure with different resistivity values. The first layer has resistivity of 10^6 to 10^12 ohm/sq and the second layer has resistivity of 10^3 to 10^9 ohm/sq, creating an optimized electrical gradient that dissipates charged particles while maintaining substrate protection
Solution Approach 2:
The patent uses a composite coating structure with two distinct layers having different electrical properties. The first layer (higher resistivity) and second layer (lower resistivity) work together to provide both substrate protection and effective charge dissipation, resolving the contradiction between protection and particle accumulation
2Reliability
If thick coatings are applied to provide electrostatic dissipation, then charge dissipation improves, but coating uniformity and conformality deteriorate
Solution Approach 1:
The patent divides the coating into multiple thin layers (first layer and second layer) rather than applying one thick coating. Each layer is deposited separately with controlled thickness, ensuring uniformity and conformality while achieving the required electrostatic dissipation through the combined effect of the layered structure
Solution Approach 2:
The patent transitions from a single-dimensional (thickness) approach to a multi-dimensional solution by creating a layered structure with different electrical properties in each layer. This dimensional change allows optimization of both thickness and electrical characteristics independently
3Quantity of substance
If porous coatings are applied to reduce material usage, then coating cost decreases, but charge dissipation effectiveness worsens
Solution Approach 1:
The patent optimizes the resistivity parameter of each layer to achieve effective charge dissipation. The first layer has resistivity of 10^6 to 10^12 ohm/sq and the second layer has resistivity of 10^3 to 10^9 ohm/sq, creating an electrical gradient that efficiently dissipates charges while using minimal material
4Manufacturing precision
If thin coatings are applied to maintain precision, then manufacturing precision improves, but electrostatic dissipation capability worsens
Solution Approach 1:
The patent uses a composite layered structure where each thin layer contributes to the overall electrostatic dissipation. The first thin layer with higher resistivity and second thin layer with lower resistivity work synergistically to provide adequate charge dissipation while maintaining thin overall thickness for precision applications
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The coating effectively dissipates static charge, minimizing substrate defects and arcing, while being cost-effective and maintaining coating integrity under extreme conditions, with uniform resistivity and reduced porosity.
Implementation Method 1
The coating may have an electrical surface/sheet resistance ranging from about 1×10^5 ohm/sq to about 1×10^11 ohm/sq
Implementation Method 2
The electrically-dissipative material may provide a dissipative path from the coating to the ground
Implementation Method 3
depositing a coating onto a surface of a chamber component using an atomic layer deposition (ALD) process
Implementation Method 4
a chemical vapor deposition (CVD) process
Implementation Method 5
a plasma enhanced atomic layer deposition (PEALD) process
Implementation Method 6
a molecular beam epitaxy (MBE) process
Data Source
AI summary
A coated chamber component comprises a chamber component and a coating deposited on a surface of the chamber component, the coating comprising an electrically-dissipative material. The electrically-dissipative material is to provide a dissipative path from the coating to a ground. The coating is uniform, conformal, and has a thickness ranging from about 10 nm to about 900 nm.