Conformal Heating Structure for Uneven Surfaces and Recesses

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Solution Overview

Problem

Conventional heating devices face challenges in efficiently heating objects with uneven exterior shapes, such as equipment around valves in semiconductor manufacturing, due to complex pipe arrangements and uneven surfaces, which lead to inefficient heat distribution.

Innovation Solution

A heating device comprising a conductive member with thermal conductivity attached to recesses of the object and a heater that covers both the conductive member and the object, with direct contact to bulge portions, ensuring efficient heat transfer through both direct contact and the conductive member.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If a conventional heating device is used on equipment with uneven exterior shape, then the heating device can be applied to simple shapes, but heating efficiency deteriorates due to uneven heat distribution

Engineering Contradiction:
Improveheating efficiencyVSAvoidevenness of exterior shape
Core Design Contradiction:
ProductivityVSShape

Solution Approach 1:

The heating device applies different heating approaches to different regions of the heated object: direct heating for bulge portions and indirect heating through conductive members for recess portions. This local differentiation of heating quality ensures efficient heat transfer across the entire uneven surface.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

Conductive members are introduced as intermediary elements to bridge the heater and the recess portions of the heated object. These conductive members fill the recesses and enable effective heat transfer to areas that cannot be directly contacted by the heater.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Temperature

If the heater directly contacts the heated object, then heat transfer is efficient, but the heater cannot reach recess portions of uneven surfaces

Engineering Contradiction:
Improveheat transfer efficiencyVSAvoidaccessibility to recess portions
Core Design Contradiction:
TemperatureVSEase of operation

Solution Approach 1:

The heating system is segmented into two distinct heating paths: direct heating for accessible areas and indirect heating through conductive members for recess areas. This segmentation allows each component to optimize its function for specific regions.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Conductive members serve as mediators that extend the heater's reach into recess portions. These members are inserted into or attached to the recess areas, enabling thermal energy to be delivered to previously inaccessible regions.

Inventive Principle:
Principle #24Intermediary (Mediator)

3Area of stationary object

If conductive members are added to reach recess portions, then heating coverage is improved, but device complexity increases

Engineering Contradiction:
Improveheating coverage areaVSAvoidstructure complexity
Core Design Contradiction:
Area of stationary objectVSDevice complexity

Solution Approach 1:

The conductive members are designed as simple, flexible components that can be easily attached to or inserted into recess portions. Their simple geometry and material properties minimize the increase in device complexity while maximizing heating coverage.

Inventive Principle:
Principle #30Flexible shells and thin films

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution enables efficient heating of objects with uneven exterior shapes by utilizing a conductive member to enhance heat transfer in recesses and direct contact with bulge portions, improving overall heating efficiency.

Implementation Method 1

a conductive member 120 having thermal conductivity

Methodology Applied
Scientific EffectThermal conduction: Conduction (thermal)

Implementation Method 2

heating the heated object directly with the portion of the heater in contact with the heated object by heat generated from the heater

Methodology Applied
Scientific EffectHeat generation: Heating

Data Source

PatentUS11215309B2Heating device and method of heating a heated object using the same
Publication Date: 2022.01.04 NICHIAS CORP
  • US11215309B2 patent drawing
  • US11215309B2 patent drawing
  • US11215309B2 patent drawing

AI summary

A heating device for being attached to and heating a heated object that requires to be heated and has an uneven exterior shape. The heating device including: a conductive member having thermal conductivity and being configured to be attached to a recess of the heated object; and a heater configured to cover and heat the heated object and the conductive member in a state where the conductive member is attached to the recess of the heated object. The heater has a portion to be in contact with a bulge portion of the heated object in a state where the conductive member is attached to the recess of the heated object and where the heated object and the conductive member are covered with the heater.