Conical Evaporator Cell with Parallel Heating Zones

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Solution Overview

Problem

Conventional evaporator cells face issues with temperature stability, non-uniform heating, and reliability at high temperatures, particularly above 1900°C, due to electrical insulator damage, resistance variations, and complex control systems, which can lead to short circuits and require disassembly for sensor failures.

Innovation Solution

An evaporator cell design featuring a crucible with parallel-connected heating areas for resistance and electron beam heating, eliminating the need for electrical insulators near the crucible opening and allowing for uniform heating, reduced magnetic fields, and simplified structure, enabling continuous operation up to 2900°C with improved temperature control.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If a heating coil with heating elements connected in series is used, then the structure is simpler, but the electrical resistance variations cause non-uniform heating and the insulators can be damaged at high temperatures

Engineering Contradiction:
Improveheating uniformityVSAvoidinsulator damage resistance
Core Design Contradiction:
Manufacturing precisionVSReliability

Solution Approach 1:

The heating coil is divided into multiple heating elements that are connected in parallel rather than in series. This segmentation allows each heating element to operate independently, compensating for resistance variations and ensuring uniform heating across all zones while eliminating the single-point failure mode of series connections.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Each heating element is designed with locally optimized properties to compensate for position-dependent resistance variations. The parallel connection allows each zone to maintain its own heating characteristics, ensuring uniform temperature distribution throughout the crucible without requiring identical properties across all heating elements.

Inventive Principle:
Principle #3Local quality

2Measurement precision

If two control circuits are implemented for resistance heating and electron beam heating, then the temperature control is improved, but the device complexity and costs increase

Engineering Contradiction:
Improvetemperature control precisionVSAvoidcontrol circuit complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

The control circuits for resistance heating and electron beam heating are merged into a single integrated control system. This unified approach allows both heating modes to be coordinated through one control architecture, reducing the number of separate control circuits while maintaining precise temperature control through coordinated operation of both heating mechanisms.

Inventive Principle:
Principle #5Merging (Combining)

3Reliability

If a heating coil with insulators is used, then the electrical insulation is provided, but the insulators can be damaged at high temperatures above 1900°C

Engineering Contradiction:
Improveelectrical insulationVSAvoidmaximum operating temperature
Core Design Contradiction:
ReliabilityVSTemperature

Solution Approach 1:

The electrical insulators are completely removed from the heating system design. Instead of using insulators to provide electrical isolation, the system relies on the inherent electrical properties of the crucible and heating elements themselves, allowing operation at temperatures above 1900°C without insulator degradation or failure.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The crucible serves as an intermediary that provides both mechanical support and electrical isolation. By designing the crucible to function as both the container and the electrical barrier, the system eliminates the need for separate insulator components that would be damaged at high temperatures.

Inventive Principle:
Principle #24Intermediary (Mediator)

4Device complexity

If the crucible is heated from the bottom only, then the heating structure is simpler, but the temperature distribution becomes inhomogeneous

Engineering Contradiction:
Improveheating structure complexityVSAvoidtemperature uniformity
Core Design Contradiction:
Device complexityVSManufacturing precision

Solution Approach 1:

The heating system is segmented into multiple heating zones distributed around the crucible, including bottom heating and lateral heating elements. This multi-zone configuration ensures uniform temperature distribution throughout the evaporant by providing heat from multiple directions simultaneously.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The heating approach transitions from one-dimensional bottom heating to three-dimensional heating by adding lateral heating elements that surround the crucible. This dimensional expansion of the heating geometry ensures uniform temperature distribution throughout the evaporant volume.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The design ensures reliable, continuous operation with enhanced temperature uniformity and stability, reducing maintenance needs and allowing for precise temperature setting across a wide range, from room temperature to high temperatures, while avoiding complex control systems and insulator-related issues.

Implementation Method 1

The heating areas are intended to be electrically connected in parallel to terminals of a power supply for resistance and electron beam heating

Methodology Applied
Scientific EffectJoule heating: Joule Heating

Implementation Method 2

The heating areas are intended to be electrically connected in parallel to terminals of a power supply for resistance and electron beam heating

Methodology Applied
Scientific EffectElectron beam heating: Electron Beam

Implementation Method 3

an evaporator cell having the features of the preamble of claim 1, in particular an effusion evaporator cell for converting an evaporant into the gas phase (evaporation, sublimation)

Methodology Applied
Scientific EffectEvaporation: Evaporation

Data Source

PatentEP2290120B1High temperature evaporator cell having conical heating element
Publication Date: 2015.10.28 FORSCHUNGSVERBUND BERLIN EV
  • EP2290120B1 patent drawingFigure 1A~2B
  • EP2290120B1 patent drawingFigure 3A~3B
  • EP2290120B1 patent drawingFigure 4~5

AI summary

Evaporation cell (100) including a crucible (10) for reception of the material to be evaporated, has a base (11) and side wall (12) which extends in the axial direction of the crucible. The crucible has a hole (13) and includes a heater on the outside of the crucible with a heater wall (21) and includes a number of heating regions. The heaters are resistance or electron beam heaters. An independent claim is included for a method of evaporating high melting materials using the evaporation cell described.