Conical Frustum Nozzle Structure for Gas Leak Sealing
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Solution Overview
Problem
Conventional nozzles used in wafer and mask cassettes experience gas leakage issues when exchanging gases, necessitating structural improvements to ensure a stable gas environment.
Innovation Solution
The nozzle design incorporates a conical frustum segment with a tapered shape and a ring-shaped rib, which together define an airflow channel, allowing the conical frustum segment to be engaged into a gas hole at a specific angle (35-70 degrees) to prevent gas leakage by tightly abutting against the inner wall, enhancing the airtight effect.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a conventional nozzle structure is used, then the gas exchange function is provided, but gas leakage occurs from the nozzle
Solution Approach 1:
The nozzle employs a conical frustum segment with a specific tapered angle (35-70 degrees) that creates a curved engagement surface. This curved geometry allows the nozzle to tightly abut against the inner wall of the gas hole, forming an effective sealing interface that prevents gas leakage while maintaining the gas exchange function.
Solution Approach 2:
The invention introduces a ring-shaped rib structure with specific dimensional parameters (width W4: 5%-18% of carrying segment radius, height H4: 0.5-2 times the distance between conical frustum and carrying segment). These parameter optimizations enhance the sealing capability by creating additional contact surfaces and structural support, effectively preventing gas leakage.
2Reliability
If the nozzle structure is modified to prevent gas leakage, then the airtight effect is improved, but the structural complexity increases
Solution Approach 1:
The nozzle is divided into distinct functional segments: a carrying segment for structural support, an assembling segment for connection, and a conical frustum segment for sealing. This segmentation allows each part to perform its specific function efficiently while maintaining overall structural integrity and avoiding unnecessary complexity.
Solution Approach 2:
The conical frustum segment is nested within the carrying segment, and the ring-shaped rib is integrated into the conical frustum structure. This nested arrangement allows the sealing components to be housed within the existing nozzle structure, achieving enhanced airtight performance without significantly increasing external dimensions or overall structural complexity.
Data Source
AI summary
A nozzle is provided and includes a carrying segment, an assembling segment, a conical frustum segment, and at least one ring-shaped rib formed on the carrying segment and surrounding the conical frustum segment. The carrying segment has a top side and an opposite bottom side. The assembling segment is formed by extending from the bottom side of the carrying segment. The conical frustum segment is formed to taper from the top side of the carrying segment in a direction away from the assembling segment. The conical frustum segment defines a central axis, and a surrounding lateral surface of the conical frustum segment and a plane perpendicular to the central axis have an angle therebetween that is within a range from 35 degrees to 70 degrees. The conical frustum segment, the carrying segment, and the assembling segment jointly define an airflow channel penetrating therethrough along the central axis.