Connected Vacuum Processing Containers With Sliding Rail Thermal Compensation
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Solution Overview
Problem
Existing substrate processing systems face challenges in maintaining stable substrate transfer positions due to thermal expansion, which can lead to displacement and distortion of processing containers.
Innovation Solution
The system employs a connected processing container design with a gap between first and second processing containers, connected via a rail portion and block portions that allow for sliding movement, along with ball casters and height adjusting members to absorb thermal expansion and contraction, ensuring stable substrate transfer.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If processing containers are connected side by side without gaps, then structural stability is improved, but thermal expansion causes displacement of substrate transfer position
Solution Approach 1:
The connected processing container is divided into a first processing container and a second processing container with a gap between them. This segmentation allows each container to independently accommodate thermal expansion without affecting the other, preventing displacement of the substrate transfer position while maintaining overall structural stability through the rail portion connection.
2Manufacturing precision
If processing containers are arranged with a gap between them, then thermal expansion is accommodated, but structural stability deteriorates
Solution Approach 1:
A rail portion is introduced as an intermediary component that spans across the gap between the first and second processing containers. Block portions on each container slide along the rail portion, providing a mechanical connection that maintains structural stability and supports the containers while allowing the gap to accommodate thermal expansion.
3Stability of the object's composition
If processing containers are rigidly connected, then structural stability is improved, but thermal expansion causes distortion
Solution Approach 1:
The connection between the first and second processing containers is made dynamic rather than rigid. The block portions can slide along the rail portion, allowing the containers to move relative to each other in response to thermal expansion and contraction. This dynamic connection maintains structural stability while preventing distortion of the containers.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design effectively suppresses fluctuations in the pitch between processing containers due to thermal expansion, maintaining accurate substrate positioning and preventing distortion, thereby ensuring reliable film formation processing.
Implementation Method 1
suppress fluctuations in the pitch between processing containers due to thermal expansion
Data Source
AI summary
There is provided a connected processing container comprising: a first processing container and a second processing container arranged side by side in a horizontal direction with a gap therebetween and respectively accommodating a substrate for vacuum processing; a first block portion fixed to the first processing container; a second block portion fixed to the second processing container and arranged side by side in the horizontal direction with respect to the first block portion; and a rail portion to which the first block portion and the second block portion are slidably connected, the rail portion being provided so as to straddle the first processing container and the second processing container.