Inspection Device Connector Diagnosis Stabilization
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Solution Overview
Problem
In semiconductor device manufacturing, self-diagnosis of connectors using a diagnosis substrate often results in false 'Fail' readings due to unstable contact states caused by environmental factors like particles and oxide films, leading to unnecessary cleaning and maintenance, which affects production yield.
Innovation Solution
A diagnostic method that includes a stabilization process for the contact between the diagnosis substrate and connectors, either by not applying voltage for a predetermined period or applying a pulse-shaped voltage, to stabilize the contact before performing the diagnosis.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If self-diagnosis is performed immediately after attaching the diagnosis substrate, then the diagnosis can be performed quickly, but false 'Fail' readings occur due to unstable contact state caused by environmental factors like particles and oxide films
Solution Approach 1:
The patent applies preliminary action by performing a stabilization process before the actual diagnosis. The diagnosis substrate is attached and allowed to stabilize for a predetermined period (e.g., 1 hour) at a predetermined temperature (e.g., 80°C) to eliminate environmental factors like particles and oxide films from the contact interfaces. This preliminary stabilization ensures that subsequent resistance measurements accurately reflect connector conditions rather than transient contact issues.
Solution Approach 2:
The patent changes physical parameters (temperature and time) to stabilize the contact state. By controlling the temperature at a predetermined value (e.g., 80°C) for a predetermined period (e.g., 1 hour), the thermal energy helps eliminate contaminants and stabilize electrical contacts. This parameter control transforms the unstable initial state into a stable measurement state, resolving the contradiction between speed and accuracy.
2Loss of time
If diagnosis is performed without stabilization process, then production time is saved, but unnecessary cleaning and maintenance are required due to false 'Fail' readings
Solution Approach 1:
The stabilization process serves as a preliminary action that prevents false diagnoses before they occur. By stabilizing the diagnosis substrate at predetermined temperature and time conditions, the system eliminates the need for subsequent unnecessary cleaning and maintenance operations that would result from false 'Fail' readings, thus actually saving time in the long run.
Solution Approach 2:
The patent converts the potentially harmful effect of extended diagnosis time into a benefit by using the stabilization period to eliminate contaminants and stabilize contacts. The additional time invested in stabilization prevents the greater time loss associated with unnecessary maintenance and cleaning operations, transforming a apparent disadvantage into a productivity improvement.
3Duration of action of moving object
If diagnosis substrate is attached and voltage is applied immediately, then the diagnosis process is completed quickly, but contact instability causes inaccurate resistance measurements
Solution Approach 1:
The patent implements preliminary action by establishing a stable contact state through controlled temperature and time conditions before applying voltage for resistance measurement. The diagnosis substrate is first attached and stabilized for a predetermined period (e.g., 1 hour) at a predetermined temperature (e.g., 80°C), ensuring that all environmental factors are eliminated before the actual electrical measurement begins.
Solution Approach 2:
The patent controls physical parameters (temperature and time) to transform the contact state from unstable to stable. By maintaining the diagnosis substrate at a predetermined temperature (e.g., 80°C) for a predetermined period (e.g., 1 hour), thermal energy eliminates contaminants and stabilizes electrical contacts, ensuring reliable resistance measurements when voltage is subsequently applied.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This method effectively reduces false 'Fail' readings by stabilizing the contact, ensuring accurate connector diagnosis and increasing production yield by minimizing unnecessary maintenance.
Implementation Method 1
it is considered that resistance values decrease with the lapse of time due to action of thermal energy
Data Source
AI summary
An inspection device has an attachment part for attaching a probe card in an inspection operation but attaching a diagnosis substrate in a self-diagnosis operation. During the inspection operation, a tester of the inspection device applies electrical signals to devices formed on a substrate through the probe card and multiple connectors of a connection member to inspect electrical characteristics of the devices During the self-diagnosis operation, a diagnosis substrate is attached to the attachment part of the inspection device instead of the probe card and a stabilization process is performed for stabilizing a contact between the diagnosis substrate and the connectors of the connection member after the diagnosis substrate is attached. The diagnosis of the multiple connectors is performed after the stabilization process.