Constant Cross-Section Fluid Passage for Uniform Thermal Conduction
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Solution Overview
Problem
Conventional fluid temperature control devices in semiconductor manufacturing suffer from reduced heating/cooling capacity and Peltier module lifespan due to non-uniform fluid flow velocity and thermal conduction, leading to increased thermal resistance and junction temperature variations.
Innovation Solution
A fluid temperature control device with a main body block featuring a passage channel of constant cross-sectional area and spiral shape, connected between inlet and outlet, utilizing a thermal conducting plate and Peltier module for uniform heat exchange, and incorporating a drain passage to prevent fluid stagnation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If the passage has a conventional configuration with varying cross-sectional area, then the device structure is simpler to manufacture, but the fluid flow velocity becomes non-uniform causing large pressure loss and reduced heating/cooling capacity
Solution Approach 1:
The passage cross-sectional area is designed to be substantially constant along its length, changing the geometric parameter from variable to constant. This maintains uniform fluid flow velocity, reduces pressure loss, and improves heating/cooling capacity without requiring complex variable-area geometry
2Temperature
If the passage has a conventional configuration, then the manufacturing process is simpler, but the thermal conduction between fluid and thermal conducting plate becomes non-uniform increasing thermal resistance
Solution Approach 1:
By changing the passage cross-sectional area parameter from variable to substantially constant, the fluid flow velocity becomes uniform along the passage length. This ensures uniform thermal conduction between the fluid and thermal conducting plate, reducing thermal resistance and improving temperature control precision
3Reliability
If the passage has a conventional configuration, then the device assembly is easier, but the Peltier module junction temperature varies causing reduced module lifespan
Solution Approach 1:
The passage is designed with substantially constant cross-sectional area, which uniformizes the fluid flow velocity and thermal conduction along the passage. This prevents localized temperature variations at the Peltier module junction, reducing thermal stress and extending module lifespan
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design ensures uniform fluid flow and thermal conduction, enhancing temperature control capacity while preventing Peltier module degradation and facilitating efficient heat transfer with reduced pressure loss and extended module lifespan.
Implementation Method 1
a Peltier module (thermoelectric module) M as the temperature control means is attached to an outer surface of each of the thermal conducting plates E
Implementation Method 2
heat exchange between the temperature control means and the treatment solution passing through the passage is carried out by way of the thermal conducting plate E
Implementation Method 3
the treatment solution is heated/cooled by the thermal conduction with the thermal conducting plate E
Data Source
AI summary
A fluid temperature control device, which includes: a main body block having a passage channel formed in a surface thereof; a thermal conducting plate that is provided on the surface of the main body block, and covers the passage channel to form a passage for passing a fluid to be temperature controlled; and temperature control means that carries out heat exchanging (heating/cooling), by way of the thermal conducting plate, with the fluid passing through the passage, in which the passage abutting on the thermal conducting plate connects a fluid inlet and a fluid outlet formed in the main body block, and is a single passage having an approximately constant passage cross-sectional area over its entire length.