High-Precision Sensing Pushrod With Contact-Block Signal Transfer
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Solution Overview
Problem
Traditional micro-vibration sensing technologies face limitations in accuracy and sensitivity due to direct contact and interaction forces between sensing elements and the object being measured, leading to measurement errors and unreliable data, particularly in high-precision applications like semiconductor manufacturing.
Innovation Solution
A high-precision sensing pushrod design incorporating multiple sensing elements and a contact block made of high vibrational conductivity or shock-absorbing material to avoid direct contact interference, allowing for precise vibration detection and control in dynamic environments.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If sensing elements directly contact the test object for vibration detection, then vibration signals can be captured, but reaction forces and interaction forces cause measurement errors and reduce accuracy
Solution Approach 1:
The patent introduces a contact block as an intermediary component between the sensing elements and the test object. The contact block transmits vibration signals to the sensing elements while isolating them from direct reaction forces and interaction forces with the test object, thereby eliminating measurement errors caused by direct contact.
Solution Approach 2:
The sensing system is segmented into distinct functional components: the contact block that interfaces with the test object, and the sensing elements that remain isolated within the housing. This segmentation allows the contact block to bear the reaction forces while the sensing elements only detect vibrations, resolving the contradiction between signal capture and measurement accuracy.
2Measurement precision
If a single type of sensing element is used for vibration detection, then device complexity is reduced, but accuracy and sensitivity are limited
Solution Approach 1:
The patent combines multiple types of sensing elements (accelerometer and force sensor) within a single integrated sensing system. This merging allows the system to simultaneously capture different aspects of vibration (acceleration and force) with complementary characteristics, achieving higher overall accuracy and sensitivity than a single sensing element could provide.
Solution Approach 2:
The integrated sensing system performs multiple detection functions simultaneously - the accelerometer measures acceleration vibrations while the force sensor measures force vibrations. This multi-functionality enables comprehensive vibration analysis across different physical quantities, enhancing measurement precision without requiring separate independent systems.
3Measurement precision
If sensing elements are isolated from direct contact to avoid reaction forces, then measurement accuracy improves, but the ability to capture full micro-vibration signals across wide frequency range may be limited
Solution Approach 1:
The contact block serves as an effective intermediary that faithfully transmits vibration signals across the full frequency range to the isolated sensing elements. By using a rigid contact block with appropriate mechanical properties, the system maintains high-frequency signal transmission capability while keeping the sensing elements isolated from reaction forces, thus preserving both accuracy and wide frequency range coverage.
Solution Approach 2:
The patent replaces direct mechanical contact between sensing elements and the test object with an indirect mechanical transmission path through the contact block. This substitution allows the sensing elements to remain isolated while still capturing the full spectrum of vibration signals through the contact block's mechanical coupling, maintaining adaptability across wide frequency ranges.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enhances the accuracy and reliability of micro-vibration detection by minimizing reaction forces and signal interference, enabling comprehensive data analysis and precise force and displacement control across a wide frequency range.
Implementation Method 1
a contact block made of high vibrational conductivity or shock-absorbing material to avoid direct contact interference
Implementation Method 2
a contact block made of high vibrational conductivity or shock-absorbing material to avoid direct contact interference
Data Source
AI summary
The present invention relates to a high-precision sensing pushrod, comprising a housing, a first sensing element, a second sensing element, a fixed post, a connecting shaft, and a contact block. The high-precision sensing pushrod of the present invention contacts a test object directly through the contact block to fully and accurately convey the vibration state of the test object. This design can: 1. avoid interference between different signals caused by the reaction force generated when the first and second sensing elements traditionally contact the test object directly, thereby eliminating measurement errors and achieving high-precision micro-vibration detection; and 2. actively or passively suppress the vibration of the test object to achieve precise force and displacement control.