Honed Contact-Knob Susceptor for Low-Accretion Wafer Support
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Solution Overview
Problem
Existing semiconductor processing systems face issues with accretion formation on reaction chamber walls and structures, which affect temperature control and mechanical reliability, and substrates can be damaged during unloading due to accretions between the substrate and susceptor.
Innovation Solution
A susceptor design with a specific arrangement of contact knobs on different circumferences to minimize contact between the substrate and the susceptor surface, using refractory ceramics and honed surfaces to reduce damage and accretion formation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the substrate is seated directly on the susceptor upper surface, then the substrate is supported during processing, but accretions form between the substrate and susceptor causing mechanical fixing and potential damage during unloading
Solution Approach 1:
The susceptor upper surface is segmented into multiple discrete contact knobs arranged at different circumferential positions instead of a continuous surface. This segmentation reduces the contact area between substrate and susceptor, minimizing accretion formation while maintaining adequate substrate support during processing
Solution Approach 2:
The contact knobs have different heights and are positioned at different circumferential locations, creating localized support points with varying properties. This local quality variation allows the substrate to be supported at critical locations while minimizing contact and accretion at other areas
2Productivity
If accretions develop on interior surfaces of the reaction chamber walls, then material layer deposition proceeds, but temperature control within the reaction chamber is complicated by changing transmissivity
Solution Approach 1:
The harmful accretion-prone upper surface of the susceptor is extracted and replaced with contact knobs made of refractory ceramic material that resists accretion formation. This removes the source of accretions from the system while maintaining the susceptor's heating and support functions
Solution Approach 2:
The susceptor is constructed as a composite structure with the disk body made of refractory ceramic material that is resistant to accretion formation. This composite material approach allows the susceptor to maintain structural integrity at high temperatures while resisting the formation of accretions that would otherwise interfere with temperature control
3Productivity
If accretions form within mechanical clearances between movable structures, then deposition proceeds, but reliability is reduced by impaired movement and increased resistance
Solution Approach 1:
The accretion-prone substrate-susceptor contact interface is extracted and replaced with a contact knob configuration that minimizes contact area. This removal of the continuous contact surface eliminates the primary site where accretions would form and impair mechanical movements
Data Source
AI summary
Susceptors, related systems, and related methods are described. Susceptors according to an embodiment of the present disclosure comprise a plurality of contact knobs. The ones from the plurality of contact knobs may be honed.