Conductive Contact Pin Structure for Stable High-Frequency Probe Contact

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Solution Overview

Problem

Existing probe pins in semiconductor inspections face issues with high-frequency current flow, leading to spark generation and damage due to gaps, and the elastic deformation of probe pins with stacked metal layers results in reduced elastic restoring force and increased stress.

Innovation Solution

The electrically conductive contact pin features an elastic portion with a plurality of unit elastic bodies spaced apart in the thickness direction, composed of a first metal layer with higher wear resistance and a second metal layer with higher conductivity, allowing easy elastic deformation and maintaining constant contact with connection pads.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If an elastic portion is provided by alternately stacking first and second metal layers to improve electrical conductivity, then the electrical conductivity of the elastic portion is improved, but the elastic deformation capability and elastic restoring force are reduced

Engineering Contradiction:

Improveelectrical conductivityVSAvoidelastic restoring force

Core Design Contradiction:

ReliabilityVSStrength

Solution Approach 1:

The elastic portion is divided into multiple unit elastic bodies spaced apart from each other in the thickness direction. Each unit elastic body can independently deform and recover, maintaining elastic restoring force while the overall structure achieves good electrical conductivity through the distributed metal layers.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

Different regions of the contact pin have different structures: the body portion has alternating metal layers for conductivity, while the elastic portion has spaced-apart unit elastic bodies for deformation capability. This local differentiation allows each region to optimize its function.

Inventive Principle:

Principle #3Local quality

2Reliability

If a solid elastic portion is used to maintain constant contact, then connection reliability is improved, but stress concentration and damage risk increase due to rigid deformation

Engineering Contradiction:

Improveconnection reliabilityVSAvoidstress concentration

Core Design Contradiction:

ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The elastic portion consists of multiple spaced-apart unit elastic bodies rather than a solid continuous structure. This segmentation allows stress to be distributed across multiple independent deformation points, reducing stress concentration at any single location while maintaining constant contact through the collective action of all unit bodies.

Inventive Principle:

Principle #1Segmentation

3Stability of the object's composition

If the elastic portion is made rigid to maintain constant contact, then contact stability is improved, but the ability to absorb deformation energy is reduced

Engineering Contradiction:

Improvecontact stabilityVSAvoiddeformation energy absorption

Core Design Contradiction:

Stability of the object's compositionVSLoss of energy

Solution Approach 1:

Multiple spaced-apart unit elastic bodies provide numerous independent deformation pathways that can absorb impact and deformation energy. Each unit body acts as an independent energy absorption element, collectively providing both stability and energy dissipation capability.

Inventive Principle:

Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The design minimizes stress on the probe pin, ensures reliable electrical contact, reduces signal distortion, and improves connection reliability by providing a foreign substance drop space, enhancing the accuracy of high-frequency inspections.

Implementation Method 1

an elastic portion enabling the one end to be pressed and compressed by the connection pad of the inspection apparatus when the guide plate is installed on the inspection apparatus side, thereby maintaining the one end in constant contact with the connection pad of the inspection apparatus

Methodology Applied

Scientific EffectElastic deformation: Elasticity

Implementation Method 2

a body portion comprising a first metal layer and a second metal layer made of a metal having relatively higher electrical conductivity than the first metal layer, alternately stacked in a thickness direction

Methodology Applied

Scientific EffectElectrical conduction: Conduction (electrical)

Data Source

PatentUS20260036605A1Electrically conductive contact pin and inspection apparatus comprising the same

Publication Date: 2026.02.05 POINT ENG

AI summary

The present invention provides an inspection apparatus comprising an electrically conductive contact pin having one end contacting a connection pad of an inspection apparatus and another end contacting a connection pad of an inspection object to inspect the inspection object, and a guide plate having a guide hole into which the electrically conductive contact pin is inserted, wherein the electrically conductive contact pin comprises a body portion including a first metal layer and a second metal layer made of a metal having relatively higher electrical conductivity than the first metal layer, alternately stacked in a thickness direction, and an elastic portion including a plurality of unit elastic bodies spaced apart from each other in the thickness direction at one end, which can be easily elastically deformed by close contact and pressing by a connection object.