Multipoint Contact Pin Configuration for Semiconductor Inspection

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Solution Overview

Problem

The existing methods for inspecting semiconductor devices using contact pins with leaf spring structures face challenges in maintaining reliable contact and extending the service life of the contact pins due to high processing accuracy requirements and potential for spark generation, especially when dealing with large currents.

Innovation Solution

A method involving a contact pin configuration with two independent contact pins, where the support portions are arranged side by side in a horizontal plane, and the tip portions are shifted relative to each other, allowing for two-point contact and current dispersion to reduce spark generation and improve manufacturing ease.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If contact pins with projections of different heights are used to achieve multipoint contact, then current dispersion is improved, but manufacturing precision requirements increase

Engineering Contradiction:
Improvecurrent dispersionVSAvoidprocessing accuracy
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The contact pin is divided into multiple independent contact portions (first contact portion, second contact portion, third contact portion) with different heights. Each contact portion independently contacts the external terminal at different positions, achieving current dispersion without requiring complex projections on a single pin. This segmentation simplifies manufacturing while maintaining reliability.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Instead of varying projection heights on a single contact pin (vertical dimension variation), the invention introduces multiple contact pins arranged in a horizontal plane with different heights. This adds horizontal arrangement as another dimension, achieving multipoint contact through spatial distribution rather than just vertical variation, thereby reducing manufacturing complexity.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Device complexity

If contact pins are arranged side by side along vertical direction, then device complexity is reduced, but contact reliability deteriorates

Engineering Contradiction:
Improvearrangement simplicityVSAvoidcontact reliability
Core Design Contradiction:
Device complexityVSReliability

Solution Approach 1:

The contact pins are arranged asymmetrically with respect to height - while their support portions are aligned in a horizontal plane for simplicity, their tip portions are at different heights. This asymmetric height arrangement ensures that each pin contacts a different portion of the external terminal, improving contact reliability without increasing horizontal arrangement complexity.

Inventive Principle:
Principle #4Asymmetry

Solution Approach 2:

Each contact pin is given different local quality in terms of tip height, allowing each pin to optimally contact its designated portion of the external terminal. The support portions maintain uniform quality for simple arrangement, while tip portions vary in height to ensure reliable multipoint contact across different contact areas.

Inventive Principle:
Principle #3Local quality

3Power

If large current flows through contact pins during inspection, then inspection capability is improved, but spark generation increases

Engineering Contradiction:
Improveinspection capabilityVSAvoidspark generation
Core Design Contradiction:
PowerVSObject-generated harmful factors

Solution Approach 1:

The large inspection current is segmented and distributed through multiple independent contact portions (first, second, and third contact portions at different heights). Each contact portion carries a portion of the total current, reducing the current density at each contact point and minimizing spark generation while maintaining the ability to perform high-power electrical inspections.

Inventive Principle:
Principle #1Segmentation

4Ease of manufacture

If tip portions of contact pins are at the same position, then manufacturing is simplified, but contact reliability decreases

Engineering Contradiction:
Improvemanufacturing simplicityVSAvoidmultipoint contact reliability
Core Design Contradiction:
Ease of manufactureVSReliability

Solution Approach 1:

Instead of varying positions only in the vertical direction (which would complicate manufacturing), the invention uses horizontal arrangement of support portions in a plane combined with vertical height variation of tip portions. This multi-dimensional arrangement achieves reliable multipoint contact while keeping the support portion alignment simple for manufacturing.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enhances the reliability of multipoint contact, extends the service life of the contact pins, and simplifies the manufacturing process by reducing the need for precise height adjustments and minimizing spark generation during the inspection process.

Implementation Method 1

a first contact pin (PIN1) and a second contact pin (PIN2) which are independent of each other... the first support portion (SPU1) and the second support portion (SPU2) are arranged side by side along a first direction (x direction)... the second tip portion (PTU2) is shifted from the first tip portion (PTU1) along a second direction (y direction)

Methodology Applied
Scientific EffectElasticity: Elasticity

Data Source

PatentEP3023796B1Method for manufacturing semiconductor device
Publication Date: 2019.05.22 RENESAS ELECTRONICS CORP
  • EP3023796B1 patent drawingFigure 1
  • EP3023796B1 patent drawingFigure 2
  • EP3023796B1 patent drawingFigure 3

AI summary

The reliability of multipoint contact by a contact pin with an external terminal is improved while achieving an improvement in easiness of manufacture of the contact pin. The contact pin includes first and second contact pins. Further, the first contact pin has a support portion extending in a y direction and a tip portion connected to the support portion. The second contact pin also has a support portion extending in the y direction and a tip portion connected to the support portion. Here, the support portion of the first contact pin and the support portion of the second contact pin are arranged side by side along an x direction in a horizontal plane (xy plane). Further, the tip portion of the second contact pin is shifted from the tip portion of the first contact pin along the y direction in the horizontal plane, crossing (perpendicular to) the x direction.